Mass-producible and efficient optical antennas with CMOS-fabricated nanometer-scale gap

Optics Express

Volumn 21, Issue 14, 2013, Pages 16561-16569

  Seok, Tae Joon ^a   Jamshidi, Arash ^a   Eggleston, Michael ^a   Wu, Ming C ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARCHES; CMOS INTEGRATED CIRCUITS; DIFFRACTION; DIPOLE ANTENNAS; FABRICATION; IMAGE RECONSTRUCTION; INTEGRATED CIRCUIT DESIGN; LIGHT; LITHOGRAPHY; OPTICAL INSTRUMENTS; RAMAN SPECTROSCOPY;

BIOCHEMICAL SENSING; DEEP-UV LITHOGRAPHY; E-BEAM LITHOGRAPHY; HIGH-RESOLUTION IMAGING; NANOMETER-SCALE GAPS; ORDERS OF MAGNITUDE; RADIATION EFFICIENCY; SURFACE ENHANCED RAMAN SPECTROSCOPY;

ANTENNAS;

DEVICE FAILURE ANALYSIS; DEVICES; EQUIPMENT DESIGN; NANOTECHNOLOGY; PHOTOMETRY; REFRACTOMETRY; SEMICONDUCTOR; SURFACE PLASMON RESONANCE; ARTICLE; EQUIPMENT; EQUIPMENT FAILURE;

EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; NANOTECHNOLOGY; PHOTOMETRY; REFRACTOMETRY; SEMICONDUCTORS; SURFACE PLASMON RESONANCE;

EID: 84880557313     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.21.016561     Document Type: Article

References (30)

1. K. B. Crozier, A. Sundaramurthy, G. S. Kino, and C. F. Quate, "Optical antennas: Resonators for local field enhancement," J. Appl. Phys. 94(7), 4632 (2003).
2. P. Mühlschlegel, H.-J. Eisler, O. J. F. Martin, B. Hecht, and D. W. Pohl, "Resonant optical antennas," Science 308(5728), 1607-1609 (2005).
3. L. Novotny and N. van Hulst, "Antennas for light," Nat. Photonics 5(2), 83-90 (2011).
4. V. Giannini, A. I. Fernández-Domínguez, S. C. Heck, and S. A. Maier, "Plasmonic nanoantennas: fundamentals and their use in controlling the radiative properties of nanoemitters," Chem. Rev. 111(6), 3888-3912 (2011).
5. L. Tang, S. E. Kocabas, S. Latif, A. K. Okyay, D.-S. Ly-Gagnon, K. C. Saraswat, and D. A. B. Miller, "Nanometre-scale germanium photodetector enhanced by a near-infrared dipole antenna," Nat. Photonics 2(4), 226-229 (2008).
6. P. Fan, K. C. Y. Huang, L. Cao, and M. L. Brongersma, "Redesigning photodetector electrodes as an optical antenna," Nano Lett. 13(2), 392-396 (2013).
7. A. Kinkhabwala, Z. Yu, S. Fan, Y. Avlasevich, K. Mullen, and W. E. Moerner, "Large single-molecule fluorescence enhancements produced by a bowtie nanoantenna," Nat. Photonics 3(11), 654-657 (2009).
8. K. J. Russell, T.-L. Liu, S. Cui, and E. L. Hu, "Large spontaneous emission enhancement in plasmonic nanocavities," Nat. Photonics 6(7), 459-462 (2012).
9. M. P. Busson, B. Rolly, B. Stout, N. Bonod, and S. Bidault, "Accelerated single photon emission from dye molecule-driven nanoantennas assembled on DNA," Nat Commun 3, 962 (2012).
10. K. C. Y. Huang, M.-K. Seo, Y. Huo, T. Sarmiento, J. S. Harris, and M. L. Brongersma, "Antenna electrodes for controlling electroluminescence," Nat Commun 3, 1005 (2012).
11. C. Höppener and L. Novotny, "Antenna-based optical imaging of single Ca2+ transmembrane proteins in liquids," Nano Lett. 8(2), 642-646 (2008).
12. T. S. van Zanten, M. J. Lopez-Bosque, and M. F. Garcia-Parajo, "Imaging individual proteins and nanodomains on intact cell membranes with a probe-based optical antenna," Small 6(2), 270-275 (2010).
13. W. A. Challener, C. Peng, A. V. Itagi, D. Karns, W. Peng, Y. Peng, X. Yang, X. Zhu, N. J. Gokemeijer, Y.-T. Hsia, G. Ju, R. E. Rottmayer, M. A. Seigler, and E. C. Gage, "Heat-assisted magnetic recording by a near-field transducer with efficient optical energy transfer," Nat. Photonics 3(4), 220-224 (2009).
14. D. P. Fromm, A. Sundaramurthy, A. Kinkhabwala, P. J. Schuck, G. S. Kino, and W. E. Moerner, "Exploring the chemical enhancement for surface-enhanced Raman scattering with Au bowtie nanoantennas," J. Chem. Phys. 124(6), 061101 (2006).
15. W. Zhu, M. G. Banaee, D. Wang, Y. Chu, and K. B. Crozier, "Lithographically fabricated optical antennas with gaps well below 10 nm," Small 7(13), 1761-1766 (2011).
16. A. Ahmed and R. Gordon, "Single molecule directivity enhanced raman scattering using nanoantennas," Nano Lett. 12(5), 2625-2630 (2012).
17. P. J. Schuck, D. P. Fromm, A. Sundaramurthy, G. S. Kino, and W. E. Moerner, "Improving the mismatch between light and nanoscale objects with gold bowtie nanoantennas," Phys. Rev. Lett. 94(1), 017402 (2005).
18. M. W. Knight, L. Liu, Y. Wang, L. Brown, S. Mukherjee, N. S. King, H. O. Everitt, P. Nordlander, and N. J. Halas, "Aluminum Plasmonic Nanoantennas," Nano Lett. 12(11), 6000-6004 (2012).
19. Y.-K. Choi, T.-J. King, and C. Hu, "A spacer patterning technology for nanoscale CMOS," IEEE Trans. Electron Devices 49(3), 436-441 (2002).
20. Y.-K. Choi, J. Zhu, J. Grunes, J. Bokor, and G. A. Somorjai, "Fabrication of Sub-10-nm silicon nanowire arrays by size reduction lithography," J. Phys. Chem. B 107(15), 3340-3343 (2003).
21. T. J. Seok, A. Jamshidi, M. Kim, S. Dhuey, A. Lakhani, H. Choo, P. J. Schuck, S. Cabrini, A. M. Schwartzberg, J. Bokor, E. Yablonovitch, and M. C. Wu, "Radiation engineering of optical antennas for maximum field enhancement," Nano Lett. 11(7), 2606-2610 (2011).
22. S. A. Maier, "Plasmonic field enhancement and SERS in the effective mode volume picture," Opt. Express 14(5), 1957-1964 (2006).
23. T. Feichtner, O. Selig, M. Kiunke, and B. Hecht, "Evolutionary optimization of optical antennas," Phys. Rev. Lett. 109(12), 127701 (2012).
24. M. Fleischmann, P. J. Hendra, and A. J. McQuillan, "Raman spectra of pyridine adsorbed at a silver electrode," Chem. Phys. Lett. 26(2), 163-166 (1974).
25. D. L. Jeanmaire and R. P. Van Duyne, "Surface raman spectroelectrochemistry: Part I. Heterocyclic, aromatic, and aliphatic amines adsorbed on the anodized silver electrode," J. Electroanal. Chem. Interfacial Electrochem. 84(1), 1-20 (1977).
26. K. Kneipp, Y. Wang, H. Kneipp, L. T. Perelman, I. Itzkan, R. R. Dasari, and M. S. Feld, "Single molecule detection using Surface-Enhanced Raman Scattering (SERS)," Phys. Rev. Lett. 78(9), 1667-1670 (1997).
27. S. Nie and S. R. Emory, "Probing single molecules and single nanoparticles by Surface-Enhanced Raman Scattering," Science 275(5303), 1102-1106 (1997).
28. D.-K. Lim, K.-S. Jeon, H. M. Kim, J.-M. Nam, and Y. D. Suh, "Nanogap-engineerable Raman-active nanodumbbells for single-molecule detection," Nat. Mater. 9(1), 60-67 (2010).
29. D.-K. Lim, K.-S. Jeon, J.-H. Hwang, H. Kim, S. Kwon, Y. D. Suh, and J.-M. Nam, "Highly uniform and reproducible surface-enhanced Raman scattering from DNA-tailorable nanoparticles with 1-nm interior gap," Nat. Nanotechnol. 6(7), 452-460 (2011).
30. Y. Fang, N.-H. Seong, and D. D. Dlott, "Measurement of the distribution of site enhancements in Surface-Enhanced Raman Scattering," Science 321(5887), 388-392 (2008).