Probing timescales during back side ablation of Molybdenum thin films with optical and electrical measurement techniques

Optics Express

Volumn 21, Issue 14, 2013, Pages 16431-16443

  Bartl, D ^a   Ametowobla, M ^a   Schmid, F ^a   Letsch, A ^a   Hafner, M ^b   Nolte, S ^c,d   Tunnermann A ^c,d  

^a ROBERT BOSCH GMBH   (Germany)

^b UNIVERSITY OF STUTTGART   (Germany)

^c FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

^d FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MOLYBDENUM; ULTRASHORT PULSES;

APPLICATION EXAMPLES; ELECTRICAL MEASUREMENT TECHNIQUES; LASER FLUENCES; MAXIMUM VELOCITY; MEASUREMENT TECHNIQUES; TEST STRUCTURE; TIME-DEPENDENT CURRENTS; TRANSPARENT SUBSTRATE;

ABLATION;

ARTIFICIAL MEMBRANE; MOLYBDENUM;

ARTIFICIAL MEMBRANE; CHEMISTRY; CONDUCTOMETRY; LASER; MATERIALS TESTING; PROCEDURES; RADIATION RESPONSE; REFRACTOMETRY; ARTICLE; METHODOLOGY; RADIATION EXPOSURE;

CONDUCTOMETRY; LASERS; MATERIALS TESTING; MEMBRANES, ARTIFICIAL; MOLYBDENUM; REFRACTOMETRY;

EID: 84880541565     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.21.016431     Document Type: Article

References (42)

1. F. Röser, T. Eidam, J. Rothhardt, O. Schmidt, D. Schimpf, J. Limpert, and A. Tünnermann, "Millijoule pulse energy high repetition rate femtosecond fiber chirped-pulse amplification system," Opt. Lett. 32, 3495-3497 (2007).
2. J. Kleinbauer, D. Eckert, S. Weiler, and D. H. Sutter, "80W ultrafast CPA-free disk laser," Proc. SPIE 6871, 68711B (2008).
3. P. Russbueldt, T. Mans, G. Rotarius, J. Weitenberg, H. D. Hoffmann, and R. Poprawe, "400W Yb:YAG innoslab fs-amplifier," Opt. Express 17, 12230-12245 (2009).
4. R. Knappe, T. Herrmann, B. Heinrich, and A. Nebel, "Novel picosecond lasers for fast micro-machining," in "Proceedings of the Third International WLT-Conference on Lasers in Manufacturing, LIM 2005", 723-728 (2005).
5. B. Chichkov, C. Momma, S. Nolte, F. Von Alvensleben, and A. Tünnermann, "Femtosecond, picosecond and nanosecond laser ablation of solids," Appl. Phys. A: Mater. Sci. Process. 63, 109-115 (1996).
6. S. Nolte, C. Momma, H. Jacobs, A. Tünnermann, B. Chichkov, B. Wellegehausen, and H. Welling, "Ablation of metals by ultrashort laser pulses," J. Opt. Soc. Am. B 14, 2716-2722 (1997).
7. D. Breitling, A. Ruf, and F. Dausinger, "Fundamental aspects in machining of metals with short and ultrashort laser pulses," Proc. SPIE 5339, 49-63 (2004).
8. A. D. Compaan, I. Matulionis, and S. Nakade, "Laser scribing of polycrystalline thin films," Opt. Laser Eng. 34, 15-45 (2000).
9. D. Ruthe, K. Zimmer, and T. Höche, "Etching of CuInSe2 thin films-comparison of femtosecond and picosecond laser ablation," Appl. Surf. Sci. 247, 447-452 (2005).
10. J. Hermann, M. Benfarah, S. Bruneau, E. Axente, G. Coustillier, T. Itina, J.-F. Guillemoles, and P. Alloncle, "Comparative investigation of solar cell thin film processing using nanosecond and femtosecond lasers," J. Phys. D: Appl. Phys. 39, 453 (2006).
11. S. Zoppel, H. Huber, and G. Reider, "Selective ablation of thin Mo and TCO films with femtosecond laser pulses for structuring thin film solar cells," Appl. Phys. A: Mater. Sci. Process. 89, 161-163 (2007).
12. H. P. Huber, F. Herrnberger, S. Kery, and S. Zoppel, "Selective structuring of thin-film solar cells by ultrafast laser ablation," Proc. SPIE 6881, 688117 (2008).
13. H. P. Huber, M. Englmaier, C. Hellwig, A. Heiss, T. Kuznicki, M. Kemnitzer, H. Vogt, R. Brenning, and J. Palm, "High speed structuring of CIS thin-film solar cells with picosecond laser ablation," Proc. SPIE 7203, 72030R (2009).
14. G. Heise, M. Englmaier, C. Hellwig, T. Kuznicki, S. Sarrach, and H. P. Huber, "Laser ablation of thin molybdenum films on transparent substrates at low fluences," Appl. Phys. A: Mater. Sci. Process. 102, 173-178 (2011).
15. T. Dalibor, S. Jost, H. Vogt, A. Heiß, S. Visbeck, T. Happ, J. Palm, A. Avellán, T. Niesen, and F. Karg, "Towards module efficiencies of 16% with an improved CIGSSe device design," in "Proceedings of the 26th EUPVSEC", 2407-2411 (2011).
16. A. B. Bullock and P. R. Bolton, "Laser-induced back ablation of aluminum thin films using picosecond laser pulses," J. Appl. Phys. 85, 460-465 (1999).
17. F. J. Mayer and G. E. Busch, "Plasma production by laser-driven explosively heated thin metal films," J. Appl. Phys. 57, 827-829 (1985).
18. A. B. Bullock, P. R. Bolton, and F. J. Mayer, "Time-integrated reflectivity of laser-induced back-ablated aluminum thin film targets," J. Appl. Phys. 82, 1828-1831 (1997).
19. S. I. Ashitkov, N. A. Inogamov, P. S. Komarov, V. V. Zhakhovsky, I. I. Oleynik, M. B. Agranat, G. I. Kanel, and V. E. Fortov, "Strength of metals in liquid and solid states at extremely high tension produced by femtosecond laser heating," AIP Conf. Proc. 1464, 120-125 (2012).
20. S. Ashitkov, M. Agranat, G. Kanel', P. Komarov, and V. Fortov, "Behavior of aluminum near an ultimate theoretical strength in experiments with femtosecond laser pulses," JETP Lett. 92, 516-520 (2010).
21. V. Schultze and M. Wagner, "Blow-off of aluminium films," Appl. Phys. A: Mater. Sci. Process. 53, 241-248 (1991).
22. Y. Nakata and T. Okada, "Time-resolved microscopic imaging of the laser-induced forward transfer process," Appl. Phys. A: Mater. Sci. Process. 69, S275-S278 (1999).
23. R. Fardel, M. Nagel, F. Nüesch, T. Lippert, and A. Wokaun, "Shadowgraphy investigation of laser-induced forward transfer: Front side and back side ablation of the triazene polymer sacrificial layer," Appl. Surf. Sci. 255, 5430-5434 (2009).
24. K. S. Kaur, R. Fardel, T. C. May-Smith, M. Nagel, D. P. Banks, C. Grivas, T. Lippert, and R. W. Eason, "Shadowgraphic studies of triazene assisted laser-induced forward transfer of ceramic thin films," J. Appl. Phys. 105, 113119 (2009).
25. D. G. Papazoglou, A. Karaiskou, I. Zergioti, and C. Fotakis, "Shadowgraphic imaging of the sub-ps laser-induced forward transfer process," Appl. Phys. Lett. 81, 1594-1596 (2002).
26. A. Kuznetsov, C. Unger, J. Koch, and B. Chichkov, "Laser-induced jet formation and droplet ejection from thin metal films," Appl. Phys. A: Mater. Sci. Process. 106, 479-487 (2012).
27. M. Domke, G. Heise, I. Richter, S. Sarrach, and H. P. Huber, "Pump-probe investigations on the laser ablation of CIS thin film solar cells," Phys. Procedia 12, 399-406 (2011).
28. M. Domke, S. Rapp, M. Schmidt, and H. P. Huber, "Ultrafast pump-probe microscopy with high temporal dynamic range," Opt. Express 20, 10330-10338 (2012).
29. M. Domke, S. Rapp, and H. Huber, "Ultra-fast movies resolve ultra-short pulse laser ablation and bump formation on thin molybdenum films," Phys. Procedia 39, 717-725 (2012).
30. M. Domke, S. Rapp, M. Schmidt, and H. Huber, "Ultra-fast movies of thin-film laser ablation," Appl. Phys. A: Mater. Sci. Process. 109, 409-420 (2012).
31. D. Bartl, A. Michalowski, M. Hafner, A. Letsch, S. Nolte, and A. Tünnermann, "Time-resolved study of back side ablated molybdenum thin films by ultrashort laser pulses," Appl. Phys. A: Mater. Sci. Process. 110, 227-233 (2013).
32. J. M. Liu, "Simple technique for measurements of pulsed gaussian-beam spot sizes," Opt. Lett. 7, 196-198 (1982).
33. G. Heise, M. Domke, J. Konrad, S. Sarrach, J. Sotrop, and H. P. Huber, "Laser lift-off initiated by direct induced ablation of different metal thin films with ultra-short laser pulses," J. Phys. D: Appl. Phys. 45, 315303 (2012).
34. A. Michalowski, D. Walter, P. Berger, and F. Dausinger, "Diagnostics of drilling process using ultrashort laser pulses," in "Proceedings of the Fourth International WLT-Conference on Lasers in Manufacturing, LIM 2007", 563-567 (2007).
35. D. P. Brunco, J. A. Kittl, C. E. Otis, P. M. Goodwin, M. O. Thompson, and M. J. Aziz, "Time-resolved temperature measurements during pulsed laser irradiation using thin film metal thermometers," Rev. Sci. Instrum. 64, 2615-2623 (1993).
36. R. A. Synowicki, B. D. Johs, and A. C. Martin, "Optical properties of soda-lime float glass from spectroscopic ellipsometry," Thin Solid Films 519, 2907-2913 (2011).
37. D. W. Lynch and W. R. Hunter, Handbook of Optical Constants of Solids, E. D. Palik, ed. (Academic Press Inc., 1985), chap. VI, pp. 303-313.
38. K. Maglic, N. Perovic, and G. Vukovic, "Specific heat and electric resistivity of molybdenum between 400 and 2500 K," High Temp.-High Pressures 29, 97-102 (1997).
39. R. S. Hixson and M. A.Winkler, "Thermophysical properties of molybdenum and rhenium," Int. J. Thermophys. 13, 477-487 (1992).
40. T. Hüpf, C. Cagran, G. Lohöfer, and G. Pottlacher, "Electrical resistivity of high melting metals up into the liquid phase (V, Nb, Ta, Mo, W)," J Phys.: Conf. Ser. 98, 062002 (2008).
41. S. Taluts, V. Zinov'yev, V. Polev, and S. Il'inykh, "Thermal diffusivity and conductivity of molybdenum in solid and liquid states." Phys. Met. Metall. 58, 191-194 (1984).
42. A. Kurichenko, S. Taluts, I. Korshunov, A. Ivlieu, and V. Zinov'ev, "Thermal diffusivity and thermal conductivity of molybdenum and molybdenum-titanium bimetal at high temperatures," High Temp.-High Pressures 21, 437-439 (1989).