Etching of CuInSe 2 thin films - Comparison of femtosecond and picosecond laser ablation

Applied Surface Science

Volumn 247, Issue 1-4, 2005, Pages 447-452

  Ruthe, David ^a   Zimmer, Klaus ^a   Höche, Thomas ^a,b  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

^b 3D Micromac AG   (Germany)

Author keywords

Ablation; CuInSe 2; Femtosecond; Laser; Picosecond

Indexed keywords

ABLATION; COPPER COMPOUNDS; CRYSTAL LATTICES; DIELECTRIC MATERIALS; ENERGY DISPERSIVE SPECTROSCOPY; ETCHING; LASER ABLATION; PHOTOVOLTAIC EFFECTS; RAMAN SPECTROSCOPY; SEMICONDUCTOR MATERIALS; SOLAR CELLS; TRANSMISSION ELECTRON MICROSCOPY;

CUINSE2; FETMOSECOND; LASER; PICOSECOND;

THIN FILMS;

EID: 19944366985     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.01.048     Document Type: Article

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