Laser lift-off initiated by direct induced ablation of different metal thin films with ultra-short laser pulses

Journal of Physics D: Applied Physics

Volumn 45, Issue 31, 2012, Pages

  Heise, Gerhard ^a   Domke, Matthias ^a   Konrad, Jan ^a   Sarrach, Sebastian ^a   Sotrop, Jürgen ^a   Huber, Heinz P ^a  

^a MUNICH UNIVERSITY OF APPLIED SCIENCES   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CONTACT LAYERS; FLUENCES; GLASS SUBSTRATES; LASER FLUENCES; LASER LIFT-OFF; METAL THIN FILM; PICOSECOND LASER PULSE; STRESS LIMITS; THERMAL DAMAGE; THERMODYNAMIC LIMITS; THIN FILM MATERIAL; THIN FILM SOLAR CELLS; UNDERLYING MECHANISM;

ABLATION; CHROMIUM; MOLYBDENUM; PLATINUM; STRESSES; SUBSTRATES; THIN FILMS; TITANIUM; ULTRAFAST LASERS;

LASER ABLATION;

EID: 84864245299     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/45/31/315303     Document Type: Article

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