Long-term adhesion studies of polyimide to inorganic and metallic layers

Materials Research Society Symposium Proceedings

Volumn 1466, Issue , 2012, Pages 7-13

  Ordonez, Juan S ^a   Boehler, Christian ^a   Schuettler, Martin ^a   Stieglitz, Thomas ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION PROMOTER; CHEMICAL ADHESION; COMPARATIVE STUDIES; DIAMOND-LIKE CARBON; INTERMEDIATE LAYERS; MICROELECTRODE ARRAY; PRESENCE OF WATER; SILICON CARBIDES (SIC);

AMORPHOUS CARBON; INTERFACES (MATERIALS); POLYIMIDES; SILICON CARBIDE; SILICON NITRIDE; SILICONES; TITANIUM NITRIDE;

ADHESION;

EID: 84880533800     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/opl.2012.1198     Document Type: Conference Paper

References (8)

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