Enhanced measurement of high aspect ratio surfaces by applied sensor tilting

20th IMEKO World Congress 2012

Volumn 3, Issue , 2012, Pages 1911-1916

  Schuler, A ^a   Weckenmann, A ^a   Hausotte, T ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

Profilometry; Servo system; Simulation; Uncertainty

Indexed keywords

CONTACT POINTS; DEPENDENT SENSORS; DYNAMIC SURFACE; HIGH ASPECT RATIO; MEASUREMENT DEVIATIONS; ROTATION KINEMATICS; SIMULATION; UNCERTAINTY;

ASPECT RATIO; KINEMATICS; PROFILOMETRY; SERVOMECHANISMS; SURFACE MEASUREMENT;

SENSORS;

EID: 84880430373     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. M. Krystek, "ISO filters for precision engineering, " Technisches Messen, vol. 76 no. 2, pp. 133-159, 2009.
2. P. M. Lonardo, H. Trumpold and L. De Chiffre, "Progress in 3D Surface Microtopography Characterization, " Annals of the CIRP, vol. 45, pp. 589-598, 1996.
3. A. Weckenmann, T. Estler, G. Peggs and D. Mcmurtry, "Probing Systems in Dimensional Metrology", Annals of the CIRP, vol. 53, no. 2, pp.657-84, 2004.
4. D. Keller, "Reconstruction of STM and AFM images distorted by finite-sized tips, " Surface Science vol. 253, pp. 353-364, 1991.
5. H. N. Hansen, K. Carneiro, H. Haitjema and L. De Chiffre, "Dimensional micro and nanometrology, " Annals of the CIRP, vol. 55, no. 2, pp. 721-743, 2006.
6. E. Lebrasseur, J.-B. Pourciel, T. Bourouina, T. Masuzawa and H. Fujita, "A new characterization tool for vertical profile measurement of high-aspect-ratio microstructures, " Journal of Micromechanics and Microengineering, vol. 12, pp. 280-285, 2002.