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Volumn 25, Issue 5, 2013, Pages 297-308
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Design and fabrication of hydrogen sulfide (H2S) gas sensor using PtSi/porous n-Si Schottky diode
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Author keywords
Breakdown voltage; Coulomb blockade effect; Electric field; Gas sensor; Hydrogen sulfide; Porous silicon; Schottky diode; Single electron effect
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Indexed keywords
COULOMB BLOCKADE EFFECTS;
DETECTION OF H;
GAS CONCENTRATION;
ROOM TEMPERATURE;
SCHOTTKY DIODES;
SCHOTTKY JUNCTIONS;
SI SUBSTRATES;
SINGLE-ELECTRON EFFECTS;
ATMOSPHERIC PRESSURE;
CHEMICAL SENSORS;
ELECTRIC BREAKDOWN;
ELECTRIC FIELDS;
GAS DETECTORS;
HYDROGEN SULFIDE;
PLATINUM;
POROUS SILICON;
SCHOTTKY BARRIER DIODES;
SULFUR DETERMINATION;
SILICON;
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EID: 84880105017
PISSN: 09144935
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (6)
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References (10)
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