Test of diffractive optical element for DUV lithography system using visible laser

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8557, Issue , 2012, Pages

  Hu, Zhonghua ^a,b   Zhu, Jing ^a   Yang, Baoxi ^a,b   Xiao, Yanfen ^a,b   Zeng, Aijun ^a,b   Huang, Huijie ^a,b  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

Diffractive optical element; DUV lithography; Off axis illumination; Test

Indexed keywords

AZIMUTH ANGLES; DIFFRACTIVE PATTERNS; DUV LITHOGRAPHY; LITHOGRAPHIC SYSTEMS; OFF-AXIS ILLUMINATION; OPTICAL PERFORMANCE; SCALAR DIFFRACTION THEORY; VISIBLE LASERS;

DENSITY (OPTICAL); MATLAB; OPTICAL DESIGN; TESTING;

DIFFRACTIVE OPTICAL ELEMENTS;

EID: 84880104977     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.999681     Document Type: Conference Paper

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