Planar silicon nitride mid-infrared devices

Applied Physics Letters

Volumn 102, Issue 25, 2013, Pages

  Tai Lin, Pao ^a   Singh, Vivek ^a   Kimerling, Lionel ^a   Murthy Agarwal, Anuradha ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIO-CHEMICAL SENSOR; COMPLEMENTARY METAL OXIDE SEMICONDUCTORS; EXTINCTION RATIOS; FUNDAMENTAL MODES; MID-INFRARED DEVICES; PHOTONIC CIRCUITS; SILICON NITRIDE (SIN); WAVELENGTH SCANNING;

CHEMICAL VAPOR DEPOSITION; DIRECTIONAL COUPLERS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INFRARED DEVICES; OPTICAL WAVEGUIDES; WAVEGUIDES;

SILICON NITRIDE;

EID: 84879865528     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4812332     Document Type: Article

References (19)

1. C. Y. Wang, T. Herr, P. Del'Haye, A. Schliesser, J. Hofer, R. Holzwarth, T. W. Hänsch, N. Picqué, and T. J. Kippenberg, " Mid-infrared optical frequency combs at 2.5 μm based on crystalline microresonators., " Nat. Commun. 4, 1345 (2013). 10.1038/ncomms2335
2. A. Schliesser, N. Picqué, and T. W. Hänsch, " Mid-infrared frequency combs.," Nat. Photonics 6, 440 (2012). 10.1038/nphoton.2012.142
3. P. T. Lin, V. Singh, J. Hu, K. Richardson, J. D. Musgraves, I. Luzinov, J. Hensley, L. C. Kimerling, and A. Agarwal, " Chip-scale mid-infrared chemical sensors using air-clad pedestal silicon waveguides.," Lab Chip 13, 2161 (2013). 10.1039/c3lc50177a
4. B. Kuyken, X. Liu, R. M. Osgood, Jr., R. Baets, G. Roelkens, and W. M. J. Green, " Mid-infrared to telecom-band supercontinuum generation in highly nonlinear silicon-on-insulator wire waveguides.," Opt. Express 19, 20172 (2011). 10.1364/OE.19.020172
5. X. Liu, B. Kuyken, G. Roelkens, R. Baets, R. M. Osgood, Jr., and W. M. J. Green, " Bridging the mid-infrared-to-telecom gap with silicon nanophotonic spectral translation.," Nat. Photonics 6, 667 (2012). 10.1038/nphoton.2012.221
6. A. Mukherjee, M. Prasanna, M. Lane, R. Go, I. Dunayevskiy, A. Tsekoun, and C. K. N. Patel, " Optically multiplexed multi-gas detection using quantum cascade laser photoacoustic spectroscopy.," Appl. Opt. 47, 4884 (2008). 10.1364/AO.47.004884
7. L. Razzari, D. Duchesne, M. Ferrera, R. Morandotti, S. Chu, B. E. Little, and D. J. Moss, " CMOS-compatible integrated optical hyper-parametric oscillator.," Nat. Photonics 4, 41 (2010). 10.1038/nphoton.2009.236
8. M. M. Milošević, M. Nedeljkovic, T. M. Ben Masaud, E. Jaberansary, H. M. H. Chong, N. G. Emerson, G. T. Reed, and G. Z. Mashanovich, " Silicon waveguides and devices for the mid-infrared.," Appl. Phys. Lett. 101, 121105 (2012). 10.1063/1.4753948
9. G. Z. Mashanovich, M. M. Milošević, M. Nedeljkovic, N. Owens, B. Xiong, E. J. Teo, and Y. Hu, " Low loss silicon waveguides for the mid-infrared.," Opt. Express 19, 7112 (2011). 10.1364/OE.19.007112
10. F. Li, S. D. Jackson, C. Grillet, E. Magi, D. Hudson, S. J. Madden, Y. Moghe, C. O'Brien, A. Read, S. G. Duvall, P. Atanackovic, B. J. Eggleton, and D. J. Moss, " Low propagation loss silicon-on-sapphire waveguides for the mid-infrared.," Opt. Express 19, 15212 (2011). 10.1364/OE.19.015212
11. P. T. Lin, V. Singh, Y. Cai, L. C. Kimerling, and A. Agarwal, " Air-clad silicon pedestal structures for broadband mid-infrared microphotonics.," Opt. Lett. 38, 1031 (2013). 10.1364/OL.38.001031
12. R. Soref, " Mid-infrared photonics in silicon and germanium.," Nat. Photonics 4, 495 (2010). 10.1038/nphoton.2010.171
13. J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, " CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects.," Nat. Photonics 4, 37 (2010). 10.1038/nphoton.2009.259
14. J. Gumpher, W. Bather, N. Mehta, and D. Wedel, " Characterization of low-temperature silicon nitride LPCVD from bis(tertiary-butylamino)silane and ammonia.," J. Electrochem. Soc. 151, G353 (2004). 10.1149/1.1690294
15. M. M. Pradhan and M. Arora, " Infrared absorptance studies of hydrogenated silicon nitride films at low temperatures.," Opt. Commun. 94, 428 (1992). 10.1016/0030-4018(92)90585-F
16. R. K. Pandey, L. S. Patil, J. P. Bange, and D. K. Gautam, " Growth and characterization of silicon nitride films for optoelectronics applications.," Opt. Mater. 27, 139 (2004). 10.1016/j.optmat.2004.02.028
17. A. Spott, Y. Liu, T. Baehr-Jones, R. Ilic, and M. Hochberg, " Silicon waveguides and ring resonators at 5.5 μm.," Appl. Phys. Lett. 97, 213501 (2010). 10.1063/1.3514234
18. R. A. Soref, S. J. Emelett, and W. R. Buchwald, " Silicon waveguided components for the long-wave infrared region.," J. Opt. A: Pure Appl. Opt. 8, 840 (2006). 10.1088/1464-4258/8/10/004
19. P. Y. Yang, S. Stankovic, J. Crnjanski, E. J. Teo, D. Thomson, A. A. Bettiol, M. B. H. Breese, W. Headley, C. Giusca, G. T. Reed, and G. Z. Mashanovich, " Silicon photonic waveguides for mid- and long-wave infrared region.," J. Mater. Sci.: Mater. Electron. 20, 159 (2009). 10.1007/s10854-007-9497-9