Study of microstructure and elemental micro-composition of ZnO:Al thin films by scanning and high resolution transmission electron microscopy and energy dispersive X-ray spectroscopy

Romanian Journal of Information Science and Technology

Volumn 14, Issue 4, 2011, Pages 346-355

  Vasile, E ^a   Plugaru, R ^a   Mihaiu, S ^b   Toader, A ^b  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

^b INSTITUTE OF PHYSICAL CHEMISTRY   (Romania)

Author keywords

Al doped ZnO films; Elemental composition; Elemental mapping; HRTEMEDX; Nanostructures; SEM EDX; Sol gel; STEM EDX

Indexed keywords

EID: 84878570540     PISSN: 14538245     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (14)

1. SCHULER T., KRAJEWSKI T., GROBELSEK I., AEGERTER M. A., A Microstructural Zone Model for the Morphology of Sol-Gel Coatings, Journal of Sol-Gel Science and Technology, Vol. 31, pp. 235-239, 2004.
2. KIM J., YUN J.-H., JEE S.-W, PARK Y. C., JU M., HAN S., KIM Y., KIM J.-H., ANDERSON W. A., LEE J.-H., YI J., Rapid thermal annealed Al-doped ZnO film for a UV detector, Materials Letters, Vol. 65, pp. 786-789, 2011.
3. GONG L., YE Z., LU J., ZHU L., HUANG J., GU X., ZHAO B., Highly transparent conductive and near-infrared reflective ZnO: Al thin films, Vacuum, Vol. 84, pp. 947- 952, 2010.
4. CHANDRAMOHAN R., VIJAYAN T. A., ARUMUGAM S., RAMALINGAM H. B., DHANASEKARAN V., SUNDARAM K., MAHALINGAM T., Effect of heat treatment on microstructural and optical properties of CBD grown Al-doped ZnO thin films, Mat. Sci.Eng. B, Vol. 176, pp. 152-156, 2011.
5. WANG H., XU M.-HUI, XU J.-WEN, REN M.-FANG, YANG L., Low temperature synthesis of sol-gel derived Al-doped ZnO thin films with rapid thermal annealing process, J. Mater. Sci.: Mater. Electron., Vol. 21, pp. 589-594, 2010.
6. LIN K.-M, CHEN Y.-Y., CHOU K.-Y., Solution derived Al-doped zinc oxide films: doping effect, microstructure and electrical property, J. Sol-Gel Sci. Technol., Vol. 49, pp. 238-242, 2009.
7. MAJOR C., NEMETH A., RADNOCZI G., CZIGANY Z., FRIED M., LABADI Z., BARSONY I., Optical and electrical characterization of aluminium doped ZnO layers, Applied Surface Science, Vol. 255, pp. 8907-8912, 2009.
8. CHEN K. J., FANG T. H., HUNG F. Y., JI L. W., CHANG S. J., YOUNG S. J., HSIAO Y. J., The crystallization and physical properties of Al-doped ZnO nanoparticles, Applied Surface Science, Vol. 254, pp. 5791-5795, 2008.
9. LIN K.-MOH, CHEN Y.-Y., CHOU K.-Y., Solution derived Al-doped zinc oxide films: doping effect, microstructure and electrical property, J. Sol-Gel Sci. Technol., Vol. 49, pp. 238-242, 2009.
10. HAN J. H., NO Y. S., KIM T. W., LEE J. Y., KIM J. Y., CHOI W. K., Microstructural and surface property variations due to the amorphous region formed by thermal annealing in Al-doped ZnO thin films grown on n-Si (1 0 0) substrates, App. Surf. Sci., Vol. 256, pp. 1920-1924, 2010.
11. MIHAIU S., TOADER A., ATKINSON I., ANASTASESCU M., VASILESCU M., ZAHARESCU M., PLUGARU R., Al-doped ZnO nanocoatings obtained by sol-gel route, Proceedings SPIE Advances Topics in Optoelectronics, microelectronics and nanotechnologies V, Vol. 7821, p. 78211D, 2010.
12. PLUGARU R., PLUGARU N., MIHAIU S., VASILE E., On the electrical conductivity in Al: ZnO layers; experimental investigation and a theoretical approach, Internat. Semic. Conf. Proceedings CAS 2010, pp. 345-348, 2010.
13. FRAGALA M. E., MALANDRINO G., Characterization of ZnO and ZnO: Al films deposited by MOCVD on oriented and amorphous substrates, Microelectronics Journal, Vol. 40, pp. 381-384, 2009.
14. MAJOR C., NEMETH A., RADNOCZI G., CZIGANY Z., FRIED M., LABADI Z., BARSONY I., Optical and electrical characterization of aluminium doped ZnO layers, App. Surf. Sci., Vol. 255, pp. 8907-8912, 2009.