Capacitive humidity sensor with a coplanar electrode structure based on anodised porous alumina film

Micro and Nano Letters

Volumn 7, Issue 11, 2012, Pages 1097-1100

  Li, Jiawei ^a,b   Liu, Ying ^a,b   Tang, Min ^a   Li, Jie ^a,b   Lin, Xinhua ^a  

^a INSTITUTE OF INTELLIGENT MACHINES   (China)

^b UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ANION CONCENTRATIONS; ANODIC ALUMINIUM OXIDE; AVERAGE SENSITIVITIES; CAPACITIVE HUMIDITY SENSORS; CO-PLANAR ELECTRODES; EFFECTIVE PERMITTIVITY; PARTIAL CAPACITANCE METHOD; TANTALUM THIN FILM;

ANODIC OXIDATION; ORGANIC ACIDS; PORE SIZE; THIN FILMS;

HUMIDITY SENSORS;

ALUMINUM OXIDE; OXALIC ACID; POROUS POLYMER; TANTALUM;

ARTICLE; ELECTRODE; FILM; HUMIDITY; SENSOR;

EID: 84878370574     PISSN: None     EISSN: 17500443     Source Type: Journal    
DOI: 10.1049/mnl.2012.0666     Document Type: Article

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