Deposition of Pt and Sn doped CeOx layers on silicon substrate

Surface and Coatings Technology

Volumn 227, Issue , 2013, Pages 15-18

  Bruyère, Stéphanie ^a   Cacucci, Arnaud ^a   Potin, Valérie ^a   Matolinova, Iva ^b   Vorokhta, Mykhailo ^b   Matolin, Vladimir ^b  

^a UNIVERSITÉ DE BOURGOGNE   (France)

^b CHARLES UNIVERSITY   (Czech Republic)

Author keywords

Cerium oxide; Magnetron sputtering; Pt; Sn; TEM; Thin film

Indexed keywords

CERIUM OXIDES; CHEMICAL COMPOSITIONS; CRYSTALLOGRAPHIC STRUCTURE; RADIO FREQUENCY MAGNETRON SPUTTERING; SILICON SUBSTRATES; SN-DOPED;

CERIUM COMPOUNDS; MAGNETRON SPUTTERING; THIN FILMS; TIN; TRANSMISSION ELECTRON MICROSCOPY;

PLATINUM;

EID: 84878346356     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2012.08.036     Document Type: Article

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