Chalcogenide glass planar photonics: From mid-IR sensing to 3-D flexible substrate integration

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8600, Issue , 2013, Pages

  Lin, Hongtao ^a   Li, Lan ^a   Zou, Yi ^a   Ogbuu, Okechukwu ^a   Danto, Sylvain ^b   Musgraves, J David ^b   Richardson, Kathleen ^b   Hu, Juejun ^a  

^a UNIVERSITY OF DELAWARE   (United States)

^b UNIVERSITY OF CENTRAL FLORIDA   (United States)

Author keywords

Chalcogenide glasses; flexible photonics; integrated optical devices; resonators; sensors; waveguides

Indexed keywords

CHALCOGENIDE GLASS; FABRICATION AND CHARACTERIZATIONS; FLEXIBLE PHOTONICS; FLEXIBLE POLYMER SUBSTRATES; INFRARED TRANSPARENCY; INTEGRATED OPTICAL DEVICES; INTEGRATED PHOTONICS; LOW PROCESSING TEMPERATURE;

LASER RESONATORS; NONLINEAR OPTICS; OPTICAL INTERCONNECTS; PHOTONICS; RESONATORS; SELENIUM COMPOUNDS; SENSORS; SUBSTRATES; TELLURIUM COMPOUNDS; WAVEGUIDES;

GLASS;

EID: 84878191602     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.2000683     Document Type: Conference Paper

References (34)

1. B. J. Eggleton, B. Luther-Davies, and K. Richardson, "Chalcogenide Photonics," Nat. Photonics 5, 141-148 (2011).
2. A. Marie-Laure, K. Julie, N. Virginie, H. Koji, I. Satoru, B. Catherine, L. Herve, C. Joel, Y. Kiyoyuki, L. Olivier, L. Jenny, C. Florent, C. Chantal, B. Bruno, "Chalcogenide Glass Optical Waveguides for Infrared Biosensing," Sensors 9, 7398-7411 (2009).
3. P. Lucas, M. Riley, C. Boussard-Pledel, B. Bureau, "Advances in chalcogenide fiber evanescent wave biochemical sensing," Anal. Biochem. 351, 1-10 (2006).
4. A. Ganjoo, H. Jain, C. Yu, J. Irudayaraj and C. Pantano, "Detection and fingerprinting of pathogens: Mid-IR biosensor using amorphous chalcogenide films," J. Non-Cryst. Solids 354, 2757-2762 (2008).
5. N. Hô, M. Phillips, H. Qiao, P. Allen, K. Krishnaswami, B. Riley, T. Myers, and N. Anheier, "Single-mode low-loss chalcogenide glass waveguides for the mid-infrared," Opt. Lett. 31, 1860-1862 (2006).
6. N. Carlie, J. D. Musgraves, B. Zdyrko, J. Hu, M. Torregiani, F. Morichetti, V. Singh, A. Agarwal, I. Luzinov, K. Richardson, L. C. Kimerling, and A. Melloni, "Integrated chalcogenide waveguide resonators for mid-IR sensing: Leveraging material properties to meet fabrication challenges," Opt. Express 18, 26728-26743 (2010).
7. A. Canciamilla, S. Grillanda, F. Morichetti, C. Ferrari, J. Hu, J. D. Musgraves, K. Richardson, A. Agarwal, L. C. Kimerling, and A. Melloni, "Photo-induced trimming of coupled ring-resonator filters and delay lines in As2S3 chalcogenide glass," Opt. Lett. 36, 4000-4002 (2011).
8. K. Richardson, L. Petit, N. Carlie, B. Zdyrko, I. Luzinov, J. Hu, A. Agarwal, L. C. Kimerling, T. Anderson, and M. Richardson, "Progress on the fabrication of on-chip, integrated chalcogenide glass (ChG)-based sensors," J. Nonlinear Opt. Phys. Mater. 19, 75-99 (2010).
9. J. Hu, N. Feng, N. Carlie, L. Petit, A. Agarwal, K. Richardson, and L. C. Kimerling, "Optical loss reduction in high-index-contrast chalcogenide glass waveguides via thermal reflow," Opt. Express 18, 1469-1478 (2010).
10. J. Hu, N. Carlie, L. Petit, A. Agarwal, K. Richardson, and L. C. Kimerling, "Demonstration of chalcogenide glass racetrack micro-resonators," Opt. Lett. 33, 761-763 (2008).
11. J. Hu, N. Carlie, L. Petit, A. Agarwal, K. Richardson, and L. C. Kimerling, "Cavity-enhanced infrared absorption in planar chalcogenide glass resonators: experiment & analysis," J. Lightwave Technol. 27, 5240-5245 (2009).
12. T. Baehr-Jones, A. Spott, R. Ilic, A. Spott, B. Penkov, W. Asher, and M. Hochberg, "Silicon-on-sapphire integrated waveguides for the mid-infrared," Opt. Express 18, 12127-12135 (2010).
13. R. Soref, "Mid-infrared photonics in silicon and germanium," Nat Photonics 4, 495-497 (2010).
14. G. Z. Mashanovich, W. R. Headley, M. M. Milosevic, N. Owens, E. J. Teo, B. Q. Xiong, P. Y. Yang, M. Nedeljkovic, J. Anguita, I. Marko, and Y. Hu, "Waveguides for mid-infrared group IV photonics," in Group IV Photonics (GFP), 2010 7th IEEE International Conference on, 374-376, 2010.
15. A. B. Seddon, "Chalcogenide glasses: a review of their preparation, properties and applications," J. Non-Cryst. Sol. 184, 44-50 (1995).
16. J. Hu, "Ultra-sensitive chemical vapor detection using micro-cavity photothermal spectroscopy," Opt. Express 18, 22174-22186 (2010).
17. H. Lin, Y. Zou, and J. Hu, "Double resonance 1-D photonic crystal cavities for single-molecule mid-infrared photothermal spectroscopy: theory and design," Opt. Lett. 37, 1304-1306 (2012).
18. N. Ho, M. C. Phillips, H. Qiao, P. J. Allen, K. Krishnaswami, B. J. Riley, T. L. Myers, and N. C. Anheier, "Single-mode low-loss chalcogenide glass waveguides for the mid-infrared," Opt. Lett. 31, 1860-1862 (2006).
19. C. Tsay, E. Mujagic, C. K. Madsen, C. F. Gmachl, and C. B. Arnold, "Mid-infrared characterization of solution-processed As2S3 chalcogenide glass waveguides," Opt. Express 18, 15523-15530 (2010).
20. C. Tsay, Y. Zha, and C. B. Arnold, "Solution-processed chalcogenide glass for integrated single-mode mid-infrared waveguides," Opt. Express 18, 26744-26753 (2010).
21. 3 substrate," Appl. Phys. Lett. 90, 011110 (2007).
22. X. Xia, Q. Chen, C. Tsay, C. B. Arnold, and C. K. Madsen, "Low-loss chalcogenide waveguides on lithium niobate for the mid-infrared," Opt. Lett. 35, 3228-3230 (2010).
23. E. D. Palik, "Handbook of Optical Constants of Solids," ed: Elsevier.
24. J. D. Musgraves, N. Carlie, J. Hu, L. Petit, A. Agarwal, K. Richardson, and L. C. Kimerling, "Comparison of the optical, thermal and structural properties of Ge-Sb-S thin films deposited using thermal evaporation and pulsed laser deposition techniques," Acta Mater. 59, 5032-5039 (2011).
25. J. Hu, V. Tarasov, N. Carlie, L. Petit, A. Agarwal, K. Richardson, and L. C. Kimerling, "Fabrication and testing of planar chalcogenide waveguide integrated microfluidic sensor," Opt. Express 15, 2307-2314 (2007).
26. J. Hu, N. Carlie, N. Feng, L. Petit, A. Agarwal, K. Richardson, and L. C. Kimerling, "Planar waveguide-coupled, high-index-contrast, high-Q resonators in chalcogenide glass for sensing," Opt. Lett. 33, 2500-2502 (2008).
27. B. Koch, L. Carson, C. Guo, C. Lee, Y. Yi, J. Zhang, M. Zin, S. Znameroski, and T. Smith, "Hurricane: A simplified optical resonator for optical-power-based sensing with nano-particle taggants," Sens. Actuators B Chem. 147, 573-580 (2010).
28. M. Zablocki, A. Sharkawy, O. Ebil, and D. Prather, "Nanomembrane transfer process for intricate photonic device applications," Opt. Lett. 36, 58-60 (2011).
29. W. Zhou, Z. Ma, H. Yang, Z. Qiang, G. Qin, H. Pang, L. Chen, W. Yang, S. Chuwongin, and D. Zhao, "Flexible photonic-crystal Fano filters based on transferred semiconductor nanomembranes," J. Phys. D. 42, 234007 (2009).
30. S. Park, Y. Xiong, R. Kim, P. Elvikis, M. Meitl, D. Kim, J. Wu, J. Yoon, C. Yu, Z. Liu, Y. Huang, K. Hwang, P. Ferreira, X. Li, K. Choquette, and J. Rogers, "Printed Assemblies of Inorganic Light-Emitting Diodes for Deformable and Semitransparent Displays," Science 325, 977-981 (2009).
31. W. Yang, H. Yang, G. Qin, Z. Ma, J. Berggren, M. Hammar, R. Soref, and W. Zhou, "Large-area InP-based crystalline nanomembrane flexible photodetectors," Appl. Phys. Lett. 96, 121107 (2010).
32. Y. Chen, H. Li, M. Li "Flexible and tunable silicon photonic circuits on plastic substrates", Sci. Rep. 2, 622 (2012).
33. X. Xu, H. Subbaraman, A. Hosseini, C. Lin, D. Kwong, and R. T. Chen, "Stamp printing of silicon-nanomembrane-based photonic devices onto flexible substrates with a suspended configuration," Opt. Lett. 37, 1020-1022 (2012).
34. L. Fan, L. Varghese, Y. Xuan, J. Wang, B. Niu, and M. Qi, "Direct fabrication of silicon photonic devices on a flexible platform and its application for strain sensing," Opt. Express 20, 20564-20575 (2012).