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Volumn 37, Issue 6, 2012, Pages 1020-1022
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Stamp printing of silicon-nanomembrane-based photonic devices onto flexible substrates with a suspended configuration
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Author keywords
[No Author keywords available]
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Indexed keywords
FLEXIBLE SUBSTRATE;
INTRICATE STRUCTURES;
KAPTON FILMS;
MINIMUM FEATURE SIZES;
MULTIMODE INTERFERENCE COUPLERS;
NANOMEMBRANES;
PHOTONIC CRYSTAL WAVEGUIDE;
PROPAGATION LOSS;
TRANSFER PRINTING;
TRANSFER YIELDS;
ADHESION;
INTEGRATED OPTICS;
LASER OPTICS;
NANOSTRUCTURES;
PHOTONIC DEVICES;
POLYIMIDES;
PRINTING;
SUBSTRATES;
WAVEGUIDES;
SILICON WAFERS;
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EID: 84863343336
PISSN: 01469592
EISSN: 15394794
Source Type: Journal
DOI: 10.1364/OL.37.001020 Document Type: Article |
Times cited : (50)
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References (11)
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