PH sensing using in house fabricated polysilicon nanoelectrode based transducer

2012 IEEE-EMBS Conference on Biomedical Engineering and Sciences, IECBES 2012

Volumn , Issue , 2012, Pages 122-125

  Rao, B Sharma ^a   Hashim, U ^a   Dhahi, T S ^a   Adam, Tijjani ^a  

^a UNIVERSITY MALAYSIA PERLIS   (Malaysia)

Author keywords

Capacitance; Conductance; LPCVD; Nanoelectrode transducer; pH buffer; RIE

Indexed keywords

BIOMOLECULE DETECTION; CONVENTIONAL PHOTOLITHOGRAPHY; ELECTRICAL CHARACTERISTIC; LPCVD; MICROELECTRODE SENSORS; NANOELECTRODE; PH BUFFERS; SILICON SUBSTRATES;

BIOASSAY; BIOCHIPS; BIOMEDICAL ENGINEERING; CAPACITANCE; ELECTRIC CONDUCTANCE; MEDICAL NANOTECHNOLOGY; MICROELECTRODES; MOLECULES; PH EFFECTS; PHOTOLITHOGRAPHY; POLYSILICON; REACTIVE ION ETCHING;

TRANSDUCERS;

EID: 84876777832     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IECBES.2012.6498063     Document Type: Conference Paper

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