Micro bump formation by using a super fine inkjet system

Proceedings - 2006 International Symposium on Microelectronics, IMAPS 2006

Volumn , Issue , 2006, Pages 478-483

  Murata, Kazuhiro ^a   Shiinizu, Kaziio ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Direct fabrication and micro bumping; Micro wiring; Super fine inkjet

Indexed keywords

CONDUCTIVE PASTES; CURRENT PACKAGING; DIRECT FABRICATIONS; FINE PATTERN PROCESSING; MICRO WIRING; NANO-METAL PARTICLES; SUPER-FINE INKJET; THREE-DIMENSIONAL STRUCTURE;

ASPECT RATIO; DROPS; METAL DRAWING;

MICROELECTRONICS;

EID: 84876568910     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

1. Kazuhiro Murata, "New ink-jet technology for the formation of ultra fine dots less than: 1/1000 the size of currently achieved -It is possible to produce ultrafine wiring of a few microns in width on the desktop-'AIST pressrelease. 2002. http://www.aist.go.jp/aist/e/newresearch.20020401/20020401. html.
2. Kazuhiro Murata, ""Super-fine ink-jet printing for nanotechnology". Proceeding of the International Conference cc MEMS. Nano and Smart Systems (ICMENS03), 346-349.2003.
3. Kazuhiro Murata, J. Matsumoto. A. Tezuka. Y. Matsuba and H. Yokovama. ""Super-fine ink-jet printing -toward the minimal manufacturing system-", Proceedings of die Symposium on Design. Test. Integration Package of MEMS/MOEMS (DTIP'20(M). 249-253.2004.
4. Kazuhiro Murata: "Fine pitch micro-bumps and micro-wires printed by super inkjet technology-". Proceedings of International Conference on Electronic; Packaging (ICEP 2005), 269-272, 2005.
5. Harima Chemical Inc.. The details of die Nanopaste™. http://www.harima.co.jp/products/electronics/e-series-frame.html.
6. Yonshige Matsuba: "Direct Patterning Using Metal Nano-Particles"', Journal of Japan Institute of Electronics Packaging. Vol 6. No.2, 130-135, 2003.
7. Hartmut Gau. Stephan Herminghaus. Peter Lenz and Reinhard Lipowsky: "Liquid Morphologies on Structured Surfaces: From Microchannels to Microchips". Science. Vol. 283.46-49 2000.
8. H. Sirringhaus, T. Kawase, R H. Friend, T. Shimoda, M Inbasekaraa, W. Wu and E P. Wu: "High-Resolution Inkjet Printing of All-Polymer Transistor Circuits". Science. Vol 290, 2123-2126, 2000..
9. Takeo Kawase, Soichi Moriya, Christopher J. and Tatsuya Shimoda: "Inkjet Printing of Polymeric Field-Effect Transistors and Its Applications". Japanese Journal of Applied Physics. Vol.44 N0.6A 3649-3658. 2005|.