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Volumn 24, Issue 7, 2009, Pages
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The revolution in energy dispersive x-ray spectrometry: Spectrum imaging at output count rates above 1 mhz with the silicon drift detector on a scanning electron microscope
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Author keywords
[No Author keywords available]
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Indexed keywords
BEAM CURRENTS;
BEAM POSITIONS;
ELEMENTAL MAPPING;
ENERGY DISPERSIVE X-RAY SPECTROMETRY;
FIELD EMISSION GUNS;
HIGH BRIGHTNESS;
HIGH INTENSITY;
HIGH SPATIAL RESOLUTION;
HIGH THROUGHPUT;
MAPPING STRATEGY;
MINOR CONSTITUENTS;
OUTPUT COUNT RATES;
RECORD INFORMATION;
SCANNING ELECTRON MICROSCOPE;
SEM;
SILICON DRIFT DETECTOR;
SPECTRUM IMAGING;
TRACE CONSTITUENTS;
X RAY SPECTRUM;
X-RAY MAPS;
DETECTORS;
FIELD EMISSION;
MAPPING;
MEASUREMENT THEORY;
MICROCRYSTALLINE SILICON;
PIXELS;
SCANNING;
SCANNING ELECTRON MICROSCOPY;
SPECTROMETRY;
X RAY SPECTROSCOPY;
X RAYS;
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EID: 84876482312
PISSN: 08876703
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (11)
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References (10)
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