Development of a large-area planar surface-wave plasma source with a cavity launcher driven by a 915 MHz UHF wave

Plasma Sources Science and Technology

Volumn 22, Issue 2, 2013, Pages

  Chang, Xijiang ^a,b   Kunii, Kazuki ^b   Liang, Rongqing ^a   Nagatsu, Masaaki ^b  

^a FUDAN UNIVERSITY   (China)

^b SHIZUOKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CYLINDRICAL CAVITIES; LARGE-AREA PLASMA; PLASMA PRODUCTION EFFICIENCY; RADIAL UNIFORMITIES; SURFACE WAVE PLASMA; THICK DIELECTRICS; ULTRA-HIGH FREQUENCY; VACUUM WINDOWS;

CARRIER CONCENTRATION; ELECTRIC DISCHARGES; ELECTRON DENSITY MEASUREMENT; PLASMA SOURCES; QUARTZ; SURFACE WAVES;

LAUNCHING;

EID: 84876260530     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/22/2/025002     Document Type: Article

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