Atomic force microscopy investigation of piezoelectric response of ZnO thin films deposited by HIPIMS

Journal of Optoelectronics and Advanced Materials

Volumn 15, Issue 1-2, 2013, Pages 77-81

  Tiron, V ^a   Coman, T ^a   Sirghi, L ^a   Popa, G ^a  

^a ALEXANDRU IOAN CUZA UNIVERSITY OF IASI   (Romania)

Author keywords

Magnetron sputtering; Piezoelectric properties; Zinc oxide

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL ATOMIC STRUCTURE; CRYSTALLINITY; GRAIN BOUNDARIES; II-VI SEMICONDUCTORS; MAGNETRON SPUTTERING; METALLIC FILMS; MORPHOLOGY; OXIDE FILMS; OXIDE MINERALS; PIEZOELECTRICITY; SURFACE MORPHOLOGY; SURFACE ROUGHNESS; ZINC OXIDE;

DEPOSITION TEMPERATURES; FILM SURFACE MORPHOLOGY; HIGH POWER IMPULSE MAGNETRON SPUTTERING (HIPIMS); PIEZOELECTRIC FORCE MICROSCOPY; PIEZOELECTRIC PROPERTY; PIEZOELECTRIC RESPONSE; SUBSTRATE TEMPERATURE; ZINC OXIDE THIN FILMS;

THIN FILMS;

EID: 84876041654     PISSN: 14544164     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)

1. E.S. Kim, R.S. Muller, IC-Processed Piezoelectric Microphone, IEEE Electron. Dev. Lett. 8, 467 (1987).
2. K. Liu, M. Sakurai, M. Aono, Sensors 10, 8604 (2010).
3. L.P. Schuler, M.M. Alkaisi, P. Miller, R.J. Reeves, Microelectron. Eng. 83, 1403 (2006).
4. J.-B. Lee, H.-J. Lee, S.-H. Seo, J.-S. Park, Thin Solid Films 398-399, 641 (2001).
5. M. Ganciu, M. Hecq, S. Konstantinidis, J. P. Dauchot, M. Touzeau, L. dePoucques, J. Bretagne, European Patent Appl. No. 4447072.2 / 22.03.2004.
6. S.V. Kalinin, A. Gruverman, Scanning Probe Microscopy of Electrical and Electromechanical Phenomena at the Nanoscale, Springer (2006).
7. A. Gruverman, S.V. Kalinin, J. Mater. Sci. 41, 107 (2006).
8. L.P. Schuler, N. Valanoor, P. Miller, I. Guy, R.J. Reeves, M.M. Alkaisi, Journal of Electronic Materials 36, 507 (2007).
9. J. F. Rosenbaum, Bulk Acoustic Wave Theory and Devices, Norwood, MA: Artech House Inc., 1945.
10. Van de Krol, R. and H.L. Tuller, Solid State Ionics 150, 167 (2002).
11. D.-S. Liu et al., Japanese Journal of Applied Physics 45, 3531 (2006).