Simplifying patterning process of ZnO nanowires by one step development and etching process

Journal of Sol-Gel Science and Technology

Volumn 64, Issue 2, 2012, Pages 304-308

  Kim, Yong Hee ^a   Baek, Nam Seob ^a   Kim, Kook Hwa ^a   Jung, Sang Don ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

Hydrothermal method; Patterned growth; Tetramethylammonium hydroxide; ZnO nanowire

Indexed keywords

DEGREE OF CRYSTALLINITY; ETCHING PROCESS; HYDROTHERMAL METHODS; PATTERN FIDELITY; PATTERNED GROWTH; PATTERNING PROCESS; TETRAMETHYL AMMONIUM HYDROXIDE; ZNO NANOWIRES;

ANISOTROPIC ETCHING; NANOWIRES; PHOTORESISTS; SOL-GEL PROCESS; ZINC COMPOUNDS;

ZINC OXIDE;

EID: 84875724310     PISSN: 09280707     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10971-012-2858-8     Document Type: Article

References (24)

1. Hu J, Odom TW, Lieber CM (1999) Acc Chem Res 32:435
2. Wang ZL (2000) Adv Mater 12:1295
3. Kolmakov A, Moskovits M (2004) Annu Rev Mater Res 34:151
4. Johnson J, Yan H, Yang P, Saykally R (2003) J Phys Chem B 107:8816
5. Pal B, Sharon M (2002) Mater Chem Phys 76:82 (Pubitemid 34249621)
6. Kong XY, Wang ZL (2003) Nano Lett 3:1625 (Pubitemid 38037174)
7. Hosono E, Fujihara S, Honma I, Zhou HS (2005) Adv Mater 17:2091 (Pubitemid 41284797)
8. Lee J, Kang BS, Hicks B, Chancellor TF Jr, Chu BH, Wang H-T, Keselowsky BG, Ren F, Lele TP (2008) Biomaterials 29:3743
9. Pan ZW, Wang ZL (2001) Science 291(9):1947 (Pubitemid 32216991)
10. Wu X, Bai H, Li C, Lu G, Shi G (2006) Chem Commun 42:1655
11. Gao PX, Wang ZL (2005) Small 1:945 (Pubitemid 43951687)
12. Yao BD, Chan YF, Wang N (2002) Appl Phys Lett 81:757 (Pubitemid 34924016)
13. Vayssieres L (2003) Adv Mater 15:464
14. Greene LE, Yuhas BD, Law M, Zitoun D, Yang P (2006) Inorg Chem 45:75353
15. Wang X, Summers CJ, Wang ZL (2004) Nano Lett 4:423 (Pubitemid 38402626)
16. Huang Y, Yu K, Zhu Z (2007) Curr Appl Phys 7:702 (Pubitemid 46991052)
17. Greyson EC, Babayan Y, Odom TW (2004) Adv Mater 16:1348
18. Xu S, Wei YG, Kirkham M, Liu J, Mai WJ, Davidovic D, Snyder RL, Wang ZL (2008) J Am Chem Soc 130:14958
19. Kang HW, Yeo J, Hwang JO, Hong S, Lee P, Han SY, Lee JH, Rho YS, Kim SO, Ko SH, Sung HJ (2011) J Phys Chem C 115:11435
20. Li H, Zhang J, Zhou X, Lu G, Yin Z, Li G, Wu T, Boey F, Venkatraman SS, Zhang H (2010) Langmuir 26:5603
21. Kohls M, Schmidt T, Katschorek H, Spanhel L, Müller G, Mais N, Wolf A, Forchel A (1999) Adv Mater 11:288
22. Mais N, Reithmaier JP, Forchel A, Kohls M, Spanhel L, Müller G (1999) Appl Phys Lett 75:2005
23. Yoo D-G, Nam S-H, Kim MH, Jeong SH, Jee H-G, Lee HJ, Lee N-E, Hong BY, Kim YJ, Jung D, Boo J-H (2008) Surf Coat Technol 202:5476
24. Lin YC, Jian YC, Jiang JH (2008) Appl Surf Sci 254:2671 (Pubitemid 351222614)