CMOS-compatible silicon nanowire based field-effect pH sensor

2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings

Volumn , Issue , 2012, Pages 113-116

  Gao, Anran ^a   Dai, Pengfei ^a   Lu, Na ^a   Li, Tie ^a   Wang, Yuelin ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

CMOS compatible; nanosensor; SiNW FET

Indexed keywords

CMOS COMPATIBLE; COMPLEMENTARY METAL OXIDE SEMICONDUCTORS; DETECTION OF CHEMICALS; FIELD EFFECT TRANSISTOR SENSORS; NANOSCALE SENSORS; SEMICONDUCTING NANOWIRES; SENSING PERFORMANCE; SINW FET;

FIELD EFFECT TRANSISTORS; MANUFACTURE; NANOSENSORS; PH; PH SENSORS; PHOTOLITHOGRAPHY; SILICON;

NANOWIRES;

EID: 84875666137     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/3M-NANO.2012.6472948     Document Type: Conference Paper

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