Research on digital calibration method for optical surface defect dimension

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8417, Issue , 2012, Pages

  Chen, Xiaoyu ^a   Liu, Dong ^a   Wang, Shitong ^a   Cao, Pin ^a   Gao, Xin ^a   Yang, Yongying ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

calibration; feature extraction; morphology; parameter fitting; Surface defects; threshold segmentation

Indexed keywords

CALIBRATION EXPERIMENTS; ELECTRON-BEAM EXPOSURE; MICROSCOPE MAGNIFICATION; MORPHOLOGICAL OPERATIONS; PARAMETER FITTING; REACTIVE ION BEAM ETCHING; STANDARDIZATION PROCESS; THRESHOLD SEGMENTATION;

DEFECTS; ELECTRON BEAM LITHOGRAPHY; FEATURE EXTRACTION; IMAGE SEGMENTATION; MANUFACTURE; MATHEMATICAL MORPHOLOGY; MICROSCOPES; MORPHOLOGY; OPTICAL TESTING; PIXELS; QUARTZ; SURFACE DEFECTS;

CALIBRATION;

EID: 84875580922     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.976030     Document Type: Conference Paper

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