Single-step fabrication of superhydrophobic micro/nano dual-scale PDMS film replicated from ultra-low-surface-energy mold

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2013, Pages 331-334

  Zhang, Xiao Sheng ^a   Jin, Bai Hong ^a   Chu, Shi Gan ^a   Peter, Nicolas ^b   Zhu, Fu Yun ^a   Zhang, Hai Xia ^a  

^a PEKING UNIVERSITY   (China)

^b INM LEIBNIZ INSTITUTE FOR NEW MATERIALS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DEEP REACTIVE ION ETCHING; HEATING TEMPERATURES; PATTERN REPLICATION; POLYDIMETHYLSILOXANE MEMBRANE; SINGLE-STEP PROCESS; STATIC CONTACT ANGLE; SURFACTANT COATING; THERMAL CROSSLINKING;

COATINGS; CONTACT ANGLE; HYDROPHOBICITY; MEMS; NANOTIPS; PLASMA APPLICATIONS; SURFACE ACTIVE AGENTS;

MICROCHANNELS;

EID: 84875444438     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2013.6474245     Document Type: Conference Paper

References (11)

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