Roughness scaling in titanium thin films: A three-dimensional molecular dynamics study of rotational and static glancing angle deposition

Applied Surface Science

Volumn 268, Issue , 2013, Pages 270-273

  Backholm, Matilda ^a   Foss, Morten ^a   Nordlund, Kai ^b  

^a AARHUS UNIVERSITY   (Denmark)

^b UNIVERSITY OF HELSINKI   (Finland)

Author keywords

Glancing angle deposition; Molecular dynamics simulations; Surface roughness

Indexed keywords

MOLECULAR DYNAMICS; SURFACE ROUGHNESS; THIN FILMS;

DEPOSITION ANGLE; DIFFERENT LENGTH SCALE; GLANCING ANGLE; GLANCING ANGLE DEPOSITION; MOLECULAR DYNAMICS SIMULATIONS; ROUGHNESS SCALING; SUBSTRATE ROTATION; TITANIUM THIN FILMS;

DEPOSITION;

EID: 84875421766     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2012.12.077     Document Type: Article

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