ECD wafer bumping and packaging for pixel detector applications

16th European Microelectronics and Packaging Conference and Exhibition 2007, EMPC 2007

Volumn , Issue , 2007, Pages 113-118

  Fritzsch, Thomas ^a   Jordan, Rafael ^a   Ehrmann, Oswin ^a   Reichl, Herbert ^a  

^a FRAUNHOFER IZM   (Germany)

Author keywords

ATLAS; Fine pitch assembly; Imaging detectors; Particle tracking; Pixel detector; Wafer bumping

Indexed keywords

ATLAS; FINE PITCH; IMAGING DETECTOR; PARTICLE TRACKING; PIXEL DETECTOR; WAFER BUMPING;

CHIP SCALE PACKAGES; ELECTROCHEMICAL SENSORS; EXHIBITIONS; MICROELECTRONICS; PACKAGING; PIXELS; PROCESSING; SENSORS; SUBSTRATES;

READOUT SYSTEMS;

EID: 84875284687     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. Wermes N. "Pixel Detectors for Tracking and Their Spin-Off in Imaging," Nuclear Instruments & Methods in Physics Research A, No. 541 (2005), pp. 150-165.
2. Hutter, M. et al: "Assembly and Reliability of Flip Chip Solder Joints Using Miniaturized Au/Sn Bumps", Proceddings 54th Electronic Components and Technology Conference, Las Vegas, June, 2004, p 49-57.
3. Wieland, R. et al: "3D Integration of CMOS Transistors with ICV-SLID Technology", Proceedings of Materials for Advanced Metallization Conference 2005, in Microelectr. Engineering 82 (2005), p. 529-533
4. Wolf, et al: "Flip Chip Bumping technology - Status and Update", Nuclear Instruments & Methods in Physics Research A, Vol. 565/1 (2006), p. 290-295
5. Dietrich, et al: "Conformance of ECD Wafer Bumping to Future Demands on CSP, 3D Integration and MEMS", Proceedings of the 56th Electronic Components and Technology Conference, San Diego, CA, May/June 2006.
6. Troncon, C.: "The ATLAS Pixel Detector" 32nd International Conference on High Energy Physics, Beijing, August. 2004, p.933-936.
7. Kagan, et al, "Radiation Hard Diamond Sensors for Future Tracking Applications," Nuclear Instrument & Methods in Physics Research A, Vol 565 (2006), p. 278-283