SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 532, Issue , 2013, Pages 119-122

Hybrid antireflective coating with plasma-etched nanostructure

(4) Schulz, Ulrike a Munzert, Peter a Rickelt, Friedrich a Kaiser, Norbert a

a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING (Germany)

Author keywords

Anti reflection; Nanostructures; Organic layers; Physical vapor deposition; Plasma etching

Indexed keywords

ANTI REFLECTIVE COATINGS; ANTI-REFLECTION; ANTIREFLECTIVE PROPERTIES; ANTIREFLECTIVE STRUCTURE; BROADBAND ANTI REFLECTIONS; INTERFERENCE COATINGS; LIGHT INCIDENCE ANGLES; ORGANIC LAYERS;

COATINGS; ETCHING; PHYSICAL VAPOR DEPOSITION; PLASMAS; SILICA;

NANOSTRUCTURES;

EID: 84875230071 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2012.11.153 Document Type: Article

Times cited : (12)

References (22)

1
- 0003025786
- C.G. Bernhard Endeavour 26 1967 79
- (1967) Endeavour , vol.26 , pp. 79
- Bernhard, C.G.¹

2
- 0000389489
- D.A.C. Bruggeman Ann. Phys. 24 1935 636
- (1935) Ann. Phys. , vol.24 , pp. 636
- Bruggeman, D.A.C.¹

3
- 0027588452
- D.H. Raguin, and G.M. Morris Appl. Opt. 32 1993 2582
- (1993) Appl. Opt. , vol.32 , pp. 2582
- Raguin, D.H.¹ Morris, G.M.²

4
- 0005934136
- M. Minot J. Opt. Soc. Am. 67 1977 1046
- (1977) J. Opt. Soc. Am. , vol.67 , pp. 1046
- Minot, M.¹

5
- 0036603274
- A. Dobrowolski, D. Poitras, P. Ma, H. Vakil, and M. Acree Appl. Opt. 41 2002 3075
- (2002) Appl. Opt. , vol.41 , pp. 3075
- Dobrowolski, A.¹ Poitras, D.² Ma, P.³ Vakil, H.⁴ Acree, M.⁵

6
- 0033170289
- A. Gombert, W. Glaubitt, and K. Rose Thin Solid Films 351 1999 73
- (1999) Thin Solid Films , vol.351 , pp. 73
- Gombert, A.¹ Glaubitt, W.² Rose, K.³

7
- 34248553593
- T. Yanagishita, K. Yasui, T. Kondo, Y. Kawamoto, K. Nishio, and H. Masuda Chem. Lett. 36 2007 530
- (2007) Chem. Lett. , vol.36 , pp. 530
- Yanagishita, T.¹ Yasui, K.² Kondo, T.³ Kawamoto, Y.⁴ Nishio, K.⁵ Masuda, H.⁶

8
- 67649921108
- Q. Chen, G. Hubbard, P.A. Shields, C. Liu, D.W.E. Allsopp, W.N. Wang, and S. Abbott Appl. Phys. Lett. 94 2009 263118
- (2009) Appl. Phys. Lett. , vol.94 , pp. 263118
- Chen, Q.¹ Hubbard, G.² Shields, P.A.³ Liu, C.⁴ Allsopp, D.W.E.⁵ Wang, W.N.⁶ Abbott, S.⁷

9
- 79952737756
- W. Joo, Y. Kim, S. Jang, and J.K. Kim Thin Solid Films 519 2011 3804
- (2011) Thin Solid Films , vol.519 , pp. 3804
- Joo, W.¹ Kim, Y.² Jang, S.³ Kim, J.K.⁴

10
- 79952738344
- B.G. Kum, Y.C. Park, Y.J. Chang, J.Y. Jeon, and H.M. Jang Thin Solid Films 519 2011 3778
- (2011) Thin Solid Films , vol.519 , pp. 3778
- Kum, B.G.¹ Park, Y.C.² Chang, Y.J.³ Jeon, J.Y.⁴ Jang, H.M.⁵

11
- 0040799916
- S. Walheim, E. Schäffer, J. Mlynek, and U. Steiner Science 283 1999 520
- (1999) Science , vol.283 , pp. 520
- Walheim, S.¹ Schäffer, E.² Mlynek, J.³ Steiner, U.⁴

12
- 79551490902
- H. Jiang, W. Zhao, C. Li, and Y. Wang Polymer 52 2011 778
- (2011) Polymer , vol.52 , pp. 778
- Jiang, H.¹ Zhao, W.² Li, C.³ Wang, Y.⁴

13
- 78049396020
- T. Okuno Proc. SPIE 7652 2010 (765203-1-8)
- (2010) Proc. SPIE , vol.7652 , pp. 765203-18
- Okuno, T.¹

14
- 66449113802
- A. Kaless, P. Munzert, U. Schulz, and N. Kaiser Surf. Coat.Technol. 20 2004 58
- (2004) Surf. Coat.Technol. , vol.20 , pp. 58
- Kaless, A.¹ Munzert, P.² Schulz, U.³ Kaiser, N.⁴

15
- 72449209794
- U. Schulz, P. Munzert, R. Leitel, I. Wendling, N. Kaiser, and A. Tünnermann Opt. Express 15 2007 13109
- (2007) Opt. Express , vol.15 , pp. 13109
- Schulz, U.¹ Munzert, P.² Leitel, R.³ Wendling, I.⁴ Kaiser, N.⁵ Tünnermann, A.⁶

16
- 41149175957
- M. Schulze, H.J. Fuchs, E.B. Kley, and A. Tünnermann Proc. SPIE 6883 2008 68830N
- (2008) Proc. SPIE , vol.6883
- Schulze, M.¹ Fuchs, H.J.² Kley, E.B.³ Tünnermann, A.⁴

17
- 77958593693
- C. Morhard, C. Pacholski, D. Lehr, R. Brunner, M. Helgert, M. Sundermann, and J.P. Spatz Nanotechnology 21 2010 425301
- (2010) Nanotechnology , vol.21 , pp. 425301
- Morhard, C.¹ Pacholski, C.² Lehr, D.³ Brunner, R.⁴ Helgert, M.⁵ Sundermann, M.⁶ Spatz, J.P.⁷

18
- 84865739870
- 10.1002/lpor.201100011
- R. Brunner, O. Sandfuchs, C. Pacholski, C. Morhard, and J. Spatz Laser Photonics Rev. 1-19 2011 10.1002/lpor.201100011
- (2011) Laser Photonics Rev. , vol.1-19
- Brunner, R.¹ Sandfuchs, O.² Pacholski, C.³ Morhard, C.⁴ Spatz, J.⁵

19
- 80455170056
- U. Schulz, C. Präfke, P. Munzert, C. Gödeker, and N. Kaiser Opt. Mater. Express 1 2011 101
- (2011) Opt. Mater. Express , vol.1 , pp. 101
- Schulz, U.¹ Präfke, C.² Munzert, P.³ Gödeker, C.⁴ Kaiser, N.⁵

20
- 21144474475
- S. Pongratz, and A. Zöller J. Vac. Sci. Technol. A 10 1992 1897
- (1992) J. Vac. Sci. Technol. A , vol.10 , pp. 1897
- Pongratz, S.¹ Zöller, A.²

21
- 79952811433
- U. Schulz, C. Präfke, C. Gödeker, N. Kaiser, and A. Tünnermann Appl. Opt. 50 2011 C31
- (2011) Appl. Opt. , vol.50 , pp. 31
- Schulz, U.¹ Präfke, C.² Gödeker, C.³ Kaiser, N.⁴ Tünnermann, A.⁵

22
- 77954905121
- I. Wendling, P. Munzert, U. Schulz, N. Kaiser, and A. Tünnermann Plasma Processes Polym. 6 2009 716
- (2009) Plasma Processes Polym. , vol.6 , pp. 716
- Wendling, I.¹ Munzert, P.² Schulz, U.³ Kaiser, N.⁴ Tünnermann, A.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.