SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 532, Issue , 2013, Pages 89-93

Large area coating of graphene at low temperature using a roll-to-roll microwave plasma chemical vapor deposition

(3) Yamada, Takatoshi a,b Ishihara, Masatou a,b Hasegawa, Masataka a,b

a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST (Japan)

b Technology Research Association for Single Wall Carbon Nanotubes TASC (Japan)

Author keywords

Coating; Graphene; Plasma CVD; Raman spectroscopy; Roll to roll deposition

Indexed keywords

LARGE-AREA COATING; LARGE-AREA DEPOSITION; LOW TEMPERATURES; MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITIONS; MICROWAVE PLASMA CVD; PROCESS PRESSURE; ROLL TO ROLL; TRANSPARENT CONDUCTIVE FILMS;

COATINGS; CONDUCTIVE FILMS; COPPER; DEPOSITION; GRAPHENE; METAL CLADDING; METHANE; PLASMA CVD; PLASMA DEPOSITION; RAMAN SPECTROSCOPY; TEMPERATURE; VAPORS;

CHEMICAL VAPOR DEPOSITION;

EID: 84875213136 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2012.12.102 Document Type: Article

Times cited : (56)

References (10)

1
- 77956430820
- S. Bae, H. Kim, Y. Lee, X. Xu, J.S. Park, Y. Zheng, J. Balakrishnan, T. Lei, H.R. Kim, Y.I. Song, Y.J. Kim, K.S. Kim, B. Ozyulaz, J.H. Ahn, B.H. Hong, and S. Iijima Nat. Nanotechnol. 5 2011 574
- (2011) Nat. Nanotechnol. , vol.5 , pp. 574
- Bae, S.¹ Kim, H.² Lee, Y.³ Xu, X.⁴ Park, J.S.⁵ Zheng, Y.⁶ Balakrishnan, J.⁷ Lei, T.⁸ Kim, H.R.⁹ Song, Y.I.¹⁰ Kim, Y.J.¹¹ Kim, K.S.¹² Ozyulaz, B.¹³ Ahn, J.H.¹⁴ Hong, B.H.¹⁵ Iijima, S.¹⁶

2
- 75749115154
- H. Yamaguchi, G. Eda, C. Mattevi, H. Kim, and M. Chhowlla ASC Nano 4 2010 524
- (2010) ASC Nano , vol.4 , pp. 524
- Yamaguchi, H.¹ Eda, G.² Mattevi, C.³ Kim, H.⁴ Chhowlla, M.⁵

3
- 79952417607
- J. Kim, M. Ishihara, Y. Koga, K. Tsugawa, M. Hasegawa, and S. Iijima Appl. Phys. Lett. 98 2011 091502
- (2011) Appl. Phys. Lett. , vol.98 , pp. 091502
- Kim, J.¹ Ishihara, M.² Koga, Y.³ Tsugawa, K.⁴ Hasegawa, M.⁵ Iijima, S.⁶

4
- 34249107668
- K. Tsugawa, M. Ishihara, J. Kim, H. Hasegawa, and Y. Koga New Diamond Front. Carbon Technol. 16 2006 337
- (2006) New Diamond Front. Carbon Technol. , vol.16 , pp. 337
- Tsugawa, K.¹ Ishihara, M.² Kim, J.³ Hasegawa, H.⁴ Koga, Y.⁵

5
- 84856546921
- A. Kromka, O. Babchenko, T. Izak, K. Hruska, and B. Rezek Vacuum 86 2012 776
- (2012) Vacuum , vol.86 , pp. 776
- Kromka, A.¹ Babchenko, O.² Izak, T.³ Hruska, K.⁴ Rezek, B.⁵

6
- 80051951365
- H. Sumi, S. Ogawa, M. Sato, A. Saikubo, E. Ikenaga, M. Nihei, and Y. Takakuwa Jpn. J. Appl. Phys. 49 2010 076201
- (2010) Jpn. J. Appl. Phys. , vol.49 , pp. 076201
- Sumi, H.¹ Ogawa, S.² Sato, M.³ Saikubo, A.⁴ Ikenaga, E.⁵ Nihei, M.⁶ Takakuwa, Y.⁷

7
- 84862813494
- T. Yamada, J. Kim, M. Ishihara, M. Hasegawa, and S. Iijima Carbon 50 2012 2615
- (2012) Carbon , vol.50 , pp. 2615
- Yamada, T.¹ Kim, J.² Ishihara, M.³ Hasegawa, M.⁴ Iijima, S.⁵

8
- 33646169643
- L.G. Cancado, K. Takai, T. Enoki, M. Endo, Y.A. Kim, H. Mizusaki, A. Jorio, L.N. Coelho, R. M-Paniago, and M.A. Pimenta Appl. Phys. Lett. 88 2006 163106
- (2006) Appl. Phys. Lett. , vol.88 , pp. 163106
- Cancado, L.G.¹ Takai, K.² Enoki, T.³ Endo, M.⁴ Kim, Y.A.⁵ Mizusaki, H.⁶ Jorio, A.⁷ Coelho, L.N.⁸ M-Paniago, R.⁹ Pimenta, M.A.¹⁰

9
- 84155170971
- T. Terasawa, and K. Saiki Carbon 50 2012 869
- (2012) Carbon , vol.50 , pp. 869
- Terasawa, T.¹ Saiki, K.²

10
- 64149126156
- L.M. Malard, M.A. Pimenta, G. Dresselhaus, and M.S. Dresselhaus Phys. Rep. 473 2009 51
- (2009) Phys. Rep. , vol.473 , pp. 51
- Malard, L.M.¹ Pimenta, M.A.² Dresselhaus, G.³ Dresselhaus, M.S.⁴

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