Performance of an inverted ion source

Review of Scientific Instruments

Volumn 84, Issue 2, 2013, Pages

  Salvadori, M C ^a   Teixeira, F S ^a   Sgubin, L G ^a   Araujo, W W R ^a   Spirin, R E ^a   Oks, E M ^b   Brown, I G ^c  

^a UNIVERSITY OF SÃO PAULO   (Brazil)

^b TOMSK STATE UNIVERSITY OF CONTROL SYSTEMS AND RADIOELECTRONICS   (Russian Federation)

^c LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM CHARACTERISTICS; CONVENTIONAL METALS; ENERGETIC ION BEAMS; EXTRACTION VOLTAGE; ION BEAM CURRENTS; ION-BEAM APPLICATIONS; METAL VAPOR VACUUM ARCS; PARAMETRIC VARIATION;

ION IMPLANTATION; ION SOURCES; METAL IONS; VACUUM APPLICATIONS; VAPORS;

ION BEAMS;

EID: 84874859100     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4793377     Document Type: Conference Paper

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