Virtual Equipment for benchmarking Predictive Maintenance algorithms

Proceedings - Winter Simulation Conference

Volumn , Issue , 2012, Pages

  Mattes, Andreas ^a   Schopka, Ulrich ^a   Schellenberger, Martin ^a   Scheibelhofer, Peter ^b   Leditzky, Gunter ^b  

^a FRAUNHOFER INSTITUTE FOR INTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB   (Germany)

^b AMS AG   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYSIS METHOD; COMPARISON STUDY; FAILURE CYCLES; INPUT DATAS; MAINTENANCE EFFECT; MULTIPLE FILAMENT; PREDICTION ALGORITHMS; PREDICTIVE MAINTENANCE; RANDOM FORESTS; SEMICONDUCTOR MANUFACTURING; TESTING ENVIRONMENT; TIME TO FAILURE; VIRTUAL EQUIPMENTS;

ALGORITHMS; BAYESIAN NETWORKS; DECISION TREES; EQUIPMENT; FORECASTING; INPUT OUTPUT PROGRAMS; SEMICONDUCTOR DEVICE MANUFACTURE;

MAINTENANCE;

EID: 84874717445     PISSN: 08917736     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/WSC.2012.6465084     Document Type: Conference Paper

References (19)

1. Berk R.A. 2008. Statistical Learning from a Regression Perspective. Springer, New York.
2. Breiman L., J.H. Friedman, R.A. Olshen, C.J. Stone. 1984. Classification and Regression Trees. Wadsworth, California.
3. Breiman, L. 1996. "Bagging predictors". Machine Learning 24:123-140. (Pubitemid 126724382)
4. Breiman L. 2001. "Random forests". Machine Learning 45(1):5-32. (Pubitemid 32933532)
5. Ebert-Uphoff, I. 2009. "A Probability-Based Approach to Soft Discretization for Bayesian Networks." Research Report GT-ME-2009-002.
6. Efron B. 1979. "Bootstrap methods: another look at the jackknife." The Annals of Statistics 7(1):1-26.
7. Hothorn T., K. Hornik, A. Zeileis. 2006. "Unbiased recursive partitioning: a conditional inference framework." Journal of Computational and Graphical Statistics, 15(3), 651-674. (Pubitemid 44554201)
8. Liaw A., M. Wiener. 2002. "Classification and Regression by randomForest." Technical report, R News.
9. Liu, Y.2008. "Predictive modeling for intelligent maintenance in complex semiconductor manufacturing processes." PhD thesis, University of Michigan,USA.
10. Mattes A., M. Koitzsch, D. Lewke, M. Müller-Zell, M. Schellenberger. 2011. "A virtual equipment as a test bench for evaluating virtual metrology algorithms." In Proceedings of the 2011 Winter Simulation Conference, Edited by Sain S., Creasey R.R., Himmelspach J., White, K.P., Fu M.: 1888-1897. Piscataway New Jersey: Institute of Electrical and Electronics Engineers, Inc
11. Murphy K.P. 2001. "The Bayes Net Toolbox for Matlab." In Computing Science and Statistics.
12. nd Ed.). Morgan Kaufmann.
13. R Development Core Team. 2011. "R: A language and environment for statistical computing. R Foundation for Statistical Computing". Vienna, Austria. ISBN 3-900051-07-0. http://www.R-project.org/.
14. Ryssel H., I. Ruge. 1978. Ionenimplantation. Teubner, Stuttgart.
15. Schirru H. A., S. Pampuri, G. De Nicolao. 2010. "Particle filtering of hidden gamma processes for robust Predictive Maintenance in Semiconductor Manufacturing." 6th IEEE Conference on Automation Science and Engineering. 57-62, Toronto.
16. Scheibelhofer P. 2011. "Tree-based methods for predictive failure detection in semiconductor Fabrication." Master thesis, Institute of Statistics, Graz University of Technology.
17. G.A. Susto, A. Beghi, C. De Luca. 2011. "A Predictive Maintenance System for Silicon Epitaxial Deposition." 7th IEEE Conference on Automation Science and Engineering. Trieste.
18. Vachtsevanos G., F.L. Lewis, M. Roemer, A. Hess, B. Wu. 2006. Intelligent Fault Diagnosis and Prognosis for Engineering Systems. Wiley, New Jersey.
19. Wolf S. 2003. Microchip Manufacturing. Lattice Press.