A virtual equipment as a test bench for evaluating virtual metrology algorithms

Proceedings - Winter Simulation Conference

Volumn , Issue , 2011, Pages 1883-1892

  Mattes, Andreas ^a   Koitzsch, Matthias ^a   Lewke, Dirk ^a   Müller Zell, Michael ^a   Schellenberger, Martin ^a  

^a FRAUNHOFER INSTITUTE FOR INTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BI-DIRECTIONAL LINKS; CAD DATA; INPUT DATAS; PHYSICAL SIMULATION; PROCESSING EQUIPMENT; REACTION CHAMBERS; SEMICONDUCTOR FABS; STATISTICAL SIMULATION; TEST BENCHES; TEST DATA; TESTING ENVIRONMENT; VIRTUAL METROLOGY; VIRTUAL TESTS;

ALGORITHMS; CHEMICAL VAPOR DEPOSITION; GRAPHICAL USER INTERFACES; UNITS OF MEASUREMENT;

EQUIPMENT;

EID: 84858015014     PISSN: 08917736     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/WSC.2011.6147902     Document Type: Conference Paper

References (7)

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