Fabrication of a micro-cantilever sensor on a single mode fibre by picoseconds laser

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8421, Issue , 2012, Pages

  Li, J ^a   Albri, F ^a   Maier, R R J ^a   MacPherson, W N ^a   Hand, D P ^a  

^a HERIOT WATT UNIVERSITY   (United Kingdom)

Author keywords

Laser fabrication; Micro machining; Optical fibre cantilever; Temperature sensing

Indexed keywords

APPLICATION AREA; DISPLACEMENT SENSOR; FREE-SPACE OPTICAL; LASER FABRICATION; MICRO-CANTILEVERS; PROOF OF CONCEPT; TEMPERATURE SENSING; TEMPERATURE SENSITIVITY;

EXPERIMENTS; FIBERS; MEMS; SINGLE MODE FIBERS; TEMPERATURE SENSORS;

NANOCANTILEVERS;

EID: 84874525132     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.975166     Document Type: Conference Paper

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