Tracing the migration history of metal catalysts in metal-assisted chemically etched silicon

ACS Nano

Volumn 7, Issue 2, 2013, Pages 1583-1590

  Güder, Firat ^a   Yang, Yang ^a   Kücìükbayrak, Umut M ^a   Zacharias, Margit ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

3D imaging; ALD; catalytic etching; nanoporous Si; pore architecture

Indexed keywords

3D IMAGING; ALD; CATALYTIC ETCHING; NANO-POROUS; PORE ARCHITECTURE;

ASPECT RATIO; COMPLEX NETWORKS; ELECTRIC IMPEDANCE TOMOGRAPHY; IMAGING SYSTEMS; MACHINERY; METALLIC COMPOUNDS; NANOPORES; POROUS SILICON; SCANNING ELECTRON MICROSCOPY; SILICON; THREE DIMENSIONAL; THREE DIMENSIONAL COMPUTER GRAPHICS; TRANSMISSION ELECTRON MICROSCOPY; ZINC OXIDE;

ATOMIC LAYER DEPOSITION;

EID: 84874431999     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn305413r     Document Type: Article

References (20)

1. 2 Produces Porous Silicon Appl. Phys. Lett. 2000, 77, 2572-2574
2. Peng, K. Q.; Yan, Y. J.; Gao, S. P.; Zhu, J. Dendrite-Assisted Growth of Silicon Nanowires in Electroless Metal Deposition Adv. Funct. Mater. 2003, 13, 127-132
3. Sailor, M. J. Porous Silicon in Practice; Wiley-VCH Verlag & Co.: Weinheim, 2012.
4. Huang, Z.; Geyer, N.; Werner, P.; de Boor, J.; Goesele, U. Metal-Assisted Chemical Etching of Silicon: a Review Adv. Mater. 2011, 23, 285-308
5. Groen, J. C.; Peffer, L. A. A.; Perez-Ramirez, J. Pore Size Determination in Modified Micro- and Mesoporous Materials. Pitfalls and Limitations in Gas Adsorption Data Analysis J Microporous Mesaporous Mater. 2003, 60, 1-17
6. Haddad, W. S.; McNulty, I.; Trebes, J. E.; Anderson, E. H.; Levesque, R. A.; Yang, L. Ultrahigh-Resolution X-ray Tomography Science 1994, 266, 1213-1215
7. Dierolf, M.; Menzel, A.; Thibault, P.; Schneider, P.; Kewish, C. M.; Wepf, R.; Bunk, O.; Pfeiffer, F. Ptychographic X-Ray Computed Tomography at the Nanoscale Nature 2010, 467, 436-439
8. Zecevic, J.; Gommes, C. J.; Friedrich, H.; de Jongh, P. E.; de Jong, K. P. Quantification of Mesoporosity of Zeolite Y-Electron Tomography Study Angew. Chem., Int Ed 2012, 51, 4213-4217
9. Knez, M.; Nielsch, K.; Niinistö, L. Synthesis and Surface Engineering of Complex Nanostructures by Atomic Layer Deposition Adv. Mater. 2007, 19, 3425-3438
10. Subannajui, K.; Güder, F.; Danhof, J.; Menzel, A.; Yang, Y.; Kirste, L.; Wang, C.; Cimalla, V.; Schwarz, U.; Zacharias, M. An Advanced Fabrication Method of Highly Ordered ZnO Nanowire Arrays on Silicon Substrates by Atomic Layer Deposition Nanotechnology 2012, 23, 235607
11. 2 Layers and Nanotubes Formed in Anodic Aluminum Oxide Nanopore Structures Small 2008, 4, 1223-1232
12. Zierold, R.; Wu, Z.; Biskupek, J.; Kaiser, U.; Bachmann, J.; Krill, C. E.; Nielsch, K. Magnetic, Multilayered Nanotubes of Low Aspect Ratios for Liquid Suspensions Adv. Funct. Mater. 2011, 21, 226-232
13. Chong, Y. T.; Yau, M. Y.; Yang, Y.; Zacharias, M.; Gortlitz, D.; Nielsch, K.; Bachmann, J. Superparamagnetic Behavior in Cobalt Iron Oxide Nanotube Arrays by Atomic Layer Deposition J. Appl. Phys. 2011, 110, 043930
14. Mallory, G. O.; Hajdu, J. B. Electroless Plating: Fundamentals and Applications; Noyes Publications/William Andrew Publishing: Norwich, 1990.
15. Sayed, S. Y.; Daly, B.; Buriak, J. M. Characterization of the Interface of Gold and Silver Nanostructures on InP and GaAs Synthesized via Galvanic Displacement J. Phys. Chem. C 2008, 112, 12291-12298
16. Tsujino, K.; Matsumura, M. Boring Deep Cylindrical Nanoholes in Silicon Using Silver Nanoparticles as a Catalyst Adv. Mater. 2005, 17, 1045-1047
17. Google SketchUp can be downloaded free of cost at http://sketchup.google. com/.
18. Cao, X.; Xie, Y.; Li, L. Spontaneous Organization of Three-Dimensionally Packed Trigonal Selenium Microspheres into Large-Area Nanowire Networks Adv. Mater. 2003, 15, 1914-1918
19. 2 Nanowire Network for High Areal Capacity Lithium Ion Microbattery Applications Nano Lett. 2012, 12, 655-660
20. Rauber, M.; Alber, I.; Müller, S.; Neumann, R.; Picht, O.; Roth, C.; Schökel, A.; Toimil-Molares, M. E.; Ensinger, W. Highly-Ordered Supportless Three-Dimensional Nanowire Networks with Tunable Complexity and Interwire Connectivity for Device Integration Nano Lett. 2011, 11, 2304-2310