Ultra low thermal budget anneals for 3D memories: Access device formation

AIP Conference Proceedings

Volumn 1496, Issue , 2012, Pages 135-138

  Huet, K ^a   Boniface, C ^a   Negru, R ^a   Venturini, J ^a  

^a Excico   (France)

Author keywords

3D; Access Device; Emerging Memory; Excimer Laser; Laser Thermal Annealing; Phase Change memory; Resistive memory

Indexed keywords

EID: 84874200511     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.4766508     Document Type: Conference Paper

References (7)

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7. K. Huet et al., Appl. Phys. Lett., 95, 231901, 2009.