Spatially and frequency-resolved monitoring of intradie capacitive coupling by heterodyne excitation infrared lock-in thermography

Applied Physics Letters

Volumn 102, Issue 5, 2013, Pages

  Leon J ^a   Perpina X ^a   Altet, J ^b   Vellvehi, M ^a   Jorda X ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^b UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE COUPLINGS; CAPACITIVE CURRENTS; DRIVE DEVICES; ELECTRICAL CHARACTERISTIC; ELECTRICAL COUPLING; ELECTRICAL SIGNAL; EXCITATION TECHNIQUE; HEAT SOURCES; HIGH FREQUENCY; HIGH FREQUENCY HF; LOCKIN THERMOGRAPHY; MICRO-ELECTRONIC DEVICES;

MICROELECTRONICS; THERMOGRAPHY (TEMPERATURE MEASUREMENT);

HETERODYNING;

EID: 84874080619     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4790299     Document Type: Article

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