Design and experiment of 3-dimensional micro-optical system for MEMS tunable lasers

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 830-833

  Zhang, X M ^a   Cai, H ^a   Lu, C ^a   Chen, C K ^a   Liu, A Q ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

LASER OPTICS; LASERS; MICROOPTICS; OPTICAL SYSTEMS; TUNING; WSI CIRCUITS;

CAVITY TUNABLE LASERS; COUPLING EFFICIENCY; LIGHT TRANSFORMATION; OPTICAL COUPLING;

MICROELECTROMECHANICAL DEVICES;

EID: 33750108619     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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