NiTi/Pb(Zr0.52Ti0.48)O3 thin film heterostructures for vibration damping in MEMS

Sensors and Actuators, A: Physical

Volumn 193, Issue , 2013, Pages 30-34

  Choudhary, Nitin ^a   Kharat, D K ^b   Van Humbeeck, J ^b   Kaur, Davinder ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY ROORKEE   (India)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Magnetron sputtering; Nanoindentation; Piezoelectric materials; Shape memory materials; Vibration damping

Indexed keywords

COEFFICIENT OF RESTITUTION; CREEP TESTS; DAMPING CAPACITY; DAMPING FACTORS; DAMPING MATERIAL; DAMPING PROPERTY; FIGURE OF MERITS; HOLD TIME; IMPACT TEST; NANOINDENTATION TECHNIQUES; PZT; SHAPE-MEMORY MATERIALS; VIBRATION-DAMPING;

CREEP; ELECTROMECHANICAL DEVICES; HARDNESS; MAGNETRON SPUTTERING; MEMS; NANOINDENTATION; PIEZOELECTRIC MATERIALS; ZIRCONIUM;

DAMPING;

EID: 84873837230     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2012.12.005     Document Type: Article

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