Gas sensing characteristics of MEMS gas sensor arrays in binary mixed-gas system

Materials Chemistry and Physics

Volumn 138, Issue 1, 2013, Pages 366-374

  Kim, Bum Joon ^a   Kim, Jung Sik ^a  

^a University of Seoul   (South Korea)

Author keywords

Ceramics; Electrochemical properties; Electromechanical techniques; Oxides; Sol gel growth

Indexed keywords

ADSORPTION SITE; CERAMICS; DETECTION OF CARBON MONOXIDE; ELECTRO-MECHANICAL TECHNIQUES; EXPERIMENTAL DATUM; GAS SENSING BEHAVIOR; GAS SENSING CHARACTERISTICS; GAS-SENSORS; MICROHEATER; MIXED GAS; MIXED SYSTEMS; MOS GAS SENSORS; NANO-SIZED PARTICLES; SELECTIVE ACTIVATION; SENSING PERFORMANCE; SENSOR RESPONSE; SOL-GEL GROWTH; SPECIFIC ADSORPTION; TARGET GAS; THREE GAS;

ADSORPTION; CARBON MONOXIDE; CHEMICAL DETECTION; ELECTROCHEMICAL PROPERTIES; GAS MIXTURES; GAS SENSING ELECTRODES; GASES; NITROGEN OXIDES; OXIDES; PARTICLE SIZE; SENSORS; SOL-GEL PROCESS; SOL-GELS;

GAS DETECTORS;

EID: 84873721188     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchemphys.2012.12.002     Document Type: Article

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