Effective parameters on diameter of carbon nanotubes by plasma enhanced chemical vapor deposition

Transactions of Nonferrous Metals Society of China (English Edition)

Volumn 22, Issue SUPPL.3, 2012, Pages

  Jeong, Kang Young ^a   Jung, Hyun Kyung ^b   Lee, Hyung Woo ^a  

^a Pusan National University   (South Korea)

^b Inje University College of Medicine   (South Korea)

Author keywords

carbon nanotubes; catalytic film thickness; plasma enhanced chemical vapor deposition; pretreatment plasma power

Indexed keywords

CATALYTIC FILMS; CATALYTIC LAYERS; DIAMETER OF CARBON NANOTUBES; DURATION TIME; EFFECTIVE PARAMETERS; OPTIMAL CONDITIONS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITIONS (PE CVD); PLASMA POWER; PRE-TREATMENT;

CARBON NANOTUBES; FILM GROWTH; FILM THICKNESS; PLASMAS; VAPORS;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 84873586483     PISSN: 10036326     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1003-6326(12)61792-0     Document Type: Article

References (16)

1. AB DALTON, S COLLINS, J RAZAL, E MUNOZ, VH EBRON, BG KIM, JN COLEMAN, JP FERRARIS, RH BAUGHMAN Continuous carbon nanotube composite fibers: Properties, potential applications, and problems [J] Journal of Materials Chemistry 14 1 2004 1 3
2. M CADEK, JN COLEMAN, V BARRON, K HEDICKE, WJ BLAU Morphological and mechanical properties of carbon-nanotube-reinforced semicrystalline and amorphous polymer composites [J] Applied Physics Letters 81 27 2002 5123 5225
3. JN COLEMAN, U KHAN, WJ BLAU, YK GUN'KO Small but strong: A review of the mechanical properties of carbon nanotube-polymer composites [J] Carbon 44 9 2006 1624 1652
4. T RUEKES, K KIM, E JOSELEVICH, GY TSENG, C CHEUNG, CM LIEBER Carbon nanotube based nonvolatile random access memory for molecular computing [J] Science 289 5496 2000 94 97
5. J KONG, NR FRANKLIN, C ZHOU, MG CHAPLINE, S PENG, K CHO, H DAI Nanotube molecular wires as chemical sensors [J] Science 287 5453 2000 622 625
6. HW LEE, SH KIM, YK KWAK, CS HAN Nanoscale fabrication of a single multiwalled carbon nanotube attached atomic force microscope tip using an electric field [J] Review of Scientific Instruments 76 2005 046108
7. S AKITA, H HISHIJIMA, Y NAKAYAMA, F TOKUMASU, K TAKEYASU Carbon nanotube tips for a scanning probe microscope: Their fabrication and properties [J] Journal of Physics D: Applied Physics 32 9 1999 1044 1049
8. A BACHTOLD, P HADLEY, T NAKANISHI, C DEKKER Logic circuits with carbon nanotube transistors [J] Science 294 5545 2001 1317 1320
9. J KONG, AM CASSELL, H DAI Chemical vapor deposition of methane for single-walled carbon nanotubes [J] Chemical Physics Letters 292 567 1998 567 574
10. ZW PAN, SS XIE, BH CHANG, LF SUN, WY ZHOU, G WANG Direct growth of aligned open carbon nanotubes by chemical vapor deposition [J] Chemical Physics Letters 299 1 1999 97 102
11. CJ LEE, J PARK Growth model of bamboo-shaped carbon nanotubes by thermal chemical vapor deposition [J] Applied Physics Letters 77 21 2000 3397 3399
12. M MEYYAPPAN A review of plasma enhanced chemical vapour deposition of carbon nanotubes [J] Journal of Physics D: Applied Physics 42 21 2009 213001
13. MS BELL, KBK TEO, RG LACERDA, WI MILNE, DB HASH, M MEYYAPPAN Carbon nanotubes by plasma-enhanced chemical vapor deposition [J] Pure Applied Chemistry 78 6 2006 1117 1125
14. LC QIN, D ZHOU, AR KRAUSS, DM GRUEN Growing carbon nanotubes by microwave plasma-enhanced chemical vapor deposition [J] Applied Physics Letters 72 26 1998 3437 3439
15. YC CHOI, YM SHIN, YH LEE, BS LEE, G PARK, WB CHOI, NS LEE, JM KIM Controlling the diameter, growth rate, and density of vertically aligned carbon nanotubes synthesized by microwave plasma-enhanced chemical vapor deposition [J] Applied Physics Letters 76 17 2000 2367 2369
16. M CHHOWALLA, KBK TEO, C DUCATI, NL RUPESINGHE, AJ AMARATUNGA, AC FERRARI, D ROY, J ROBERTSON, WI MILNE Growth process conditions of vertically aligned carbon nanotubes using plasma enhanced chemical vapor deposition [J] Journal of Applied Physics 90 10 2001 5308 5317