Near-field electrospray microprinting of polymer-derived ceramics

Journal of Microelectromechanical Systems

Volumn 22, Issue 1, 2013, Pages 1-3

  Duan, Hongxu ^a   Li, Cheng ^a   Yang, Weiwei ^a   Lojewski, Brandon ^b   An, Linan ^a   Deng, Weiwei ^a  

^a University of Central Florida   (United States)

^b Mesdi Systems   (United States)

Author keywords

Electrospray (ES); high temperature; polymer derived ceramics (PDCs); printing

Indexed keywords

CERAMIC PRECURSOR; CHARGED DROPLET; CORROSIVE ENVIRONMENT; COULOMBIC REPULSION; ELECTROSPRAYS; HIGH TEMPERATURE; MEMS MATERIALS; MEMSDEVICES; MICROPRINTING; NEAR-FIELD; POLYMER-DERIVED CERAMICS; RESIDENCE TIME; TECHNICAL CHALLENGES;

ELECTROMECHANICAL DEVICES; MEMS; POLYMERS; PRINTING; SILICON ALLOYS;

CERAMIC MATERIALS;

EID: 84873293922     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2012.2226932     Document Type: Article

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