Development of thin film cathodes for lithium-ion batteries in the material system Li-Mn-O by r.f. magnetron sputtering

Thin Solid Films

Volumn 528, Issue , 2013, Pages 217-223

  Fischer, J ^a   Adelhelm, C ^a   Bergfeldt, T ^a   Chang, K ^b   Ziebert, C ^a   Leiste, H ^a   Stuber M ^a   Ulrich, S ^a   Music, D ^b   Hallstedt, B ^b   Seifert, H J ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^b RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

All solid state battery; Cubic spinel; Lithium manganese oxide; Lithium ion battery; Orthorhombic lithium manganese oxide; Physical vapor deposition; R.f. magnetron sputtering; Thin film cathode

Indexed keywords

ALL-SOLID STATE BATTERIES; CUBIC SPINEL; LITHIUM MANGANESE OXIDE; LITHIUM-ION BATTERY; R.F. MAGNETRON SPUTTERING; THIN FILM CATHODES;

ARGON; CARBON BLACK; CATHODES; ELECTRIC BATTERIES; EMISSION SPECTROSCOPY; INDUCTIVELY COUPLED PLASMA; LITHIUM BATTERIES; LITHIUM COMPOUNDS; MAGNETRON SPUTTERING; MANGANESE; MANGANESE OXIDE; OXIDES; PHYSICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SOLID STATE DEVICES; THIN FILMS; VAPOR DEPOSITION; X RAY DIFFRACTION;

LITHIUM;

EID: 84872900522     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2012.08.058     Document Type: Conference Paper

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