Investigation and optimization of the emission parameters of alloy liquid metal ion sources

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 161, Issue , 2000, Pages 1128-1131

  Bischoff, L ^a   Teichert, J ^a   Hausmann, S ^a   Ganetsos, T ^b   Mair, G L R ^b  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^b UNIVERSITY OF ATHENS   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

COBALT ALLOYS; GOLD ALLOYS; ION BEAMS; LIQUID METALS; TEMPERATURE;

ENERGY SPREAD; FOCUSED ION BEAM; SOURCE TEMPERATURE;

ION SOURCES;

EID: 0033886681     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(99)00859-9     Document Type: Article

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