Structure and mechanical properties of silica doped zirconia thin films

Thin Solid Films

Volumn 527, Issue , 2013, Pages 200-204

  Uhlmann, Ina ^a   Hawelka, Dominik ^b   Hildebrandt, Erwin ^a   Pradella, Jens ^c   Rödel, Jürgen ^a  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

^b FRAUNHOFER INSTITUTE FOR LASER TECHNOLOGY   (Germany)

^c MERCK KGAA   (Germany)

Author keywords

Ball cratering; Crystal structure; Hardness; Micro abrasion; SiO2; Sol gel; Wear; ZrO2

Indexed keywords

BALL CRATERING; CRACK FREE; DEPOSITION COATING; DOPED ZIRCONIA; FILM DENSITY; LAYER THICKNESS; MICROABRASION; MULTI-LAYER-COATING; OXIDE COATING; SIO2; THERMAL GRAVIMETRIC ANALYSIS; WEAR-RESISTANT COATING; YOUNG'S MODULUS; ZRO2;

ABRASION; CRYSTAL STRUCTURE; ELASTIC MODULI; FILM PREPARATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HARDNESS; OPTICAL MULTILAYERS; PROTECTIVE COATINGS; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; SILICA; SINTERING; SOL-GEL PROCESS; SOL-GELS; THERMOGRAVIMETRIC ANALYSIS; TRIBOLOGY; WEAR OF MATERIALS; WEAR RESISTANCE; X RAY DIFFRACTION;

ZIRCONIA;

EID: 84872617205     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2012.08.007     Document Type: Article

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