Holographic method for topography measurement of highly tilted and high numerical aperture micro structures

Optics and Laser Technology

Volumn 49, Issue , 2013, Pages 38-46

  Kozacki, Tomasz ^a   Lizewski, Kamil ^a   Kostencka, Julianna ^a  

^a WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Digital holographic microscopy; High NA topography measurement; Shape measurement of inclined samples

Indexed keywords

ANALYTICAL EXPRESSIONS; DETECTION PLANE; DIGITAL HOLOGRAPHIC MICROSCOPY; EXPERIMENTAL MEASUREMENTS; HIGH NA; HIGH NUMERICAL APERTURES; HOLOGRAPHIC METHOD; IMAGE PLANE; INTERFEROMETRIC MEASUREMENT; LOCAL SHAPE; NUMERICAL APERTURE; REFLECTION CONFIGURATION; SHAPE CHARACTERIZATION; SHAPE GRADIENT; SHAPE MEASUREMENTS; THREE-DIMENSIONAL SHAPE; TILTED GEOMETRY; TILTED PLANES; TOPOGRAPHY MEASUREMENT;

MICROSCOPIC EXAMINATION; TOPOGRAPHY;

APPROXIMATION ALGORITHMS;

EID: 84872352172     PISSN: 00303992     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlastec.2012.12.001     Document Type: Article

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