A 120 GHz dielectric sensor in SiGe BiCMOS

IEEE Microwave and Wireless Components Letters

Volumn 23, Issue 1, 2013, Pages 46-48

  Schmalz, Klaus ^a   Borngraber, Johannes ^a   Kaynak, Mehmet ^a   Winkler, Wolfgang ^b   Wessel, Jan ^a   Neshat, Mohammad ^c,d   Safavi Naeini, Safieddin ^c  

^a IHP   (Germany)

^b SILICON RADAR GMBH   (Germany)

^c UNIVERSITY OF WATERLOO   (Canada)

^d JOHNS HOPKINS UNIVERSITY   (United States)

Author keywords

Integrated sensor; mm wave; resonator; SiGe

Indexed keywords

120 GHZ; BACK-SIDE ETCHING; DIELECTRIC SENSORS; INTEGRATED SENSORS; MM-WAVE; OUTPUT VOLTAGES; PLANAR RESONATORS; POWER DETECTORS; SIGE; SIGE BICMOS;

DIELECTRIC DEVICES; FREQUENCY RESPONSE; RESONATORS; SENSORS; SILICON ALLOYS;

SEMICONDUCTING SILICON;

EID: 84872330836     PISSN: 15311309     EISSN: None     Source Type: Journal    
DOI: 10.1109/LMWC.2012.2234091     Document Type: Article

References (9)

1. K. Grenier, D. Dubuc, P.-E. Poleni, and M. Kumemura, "Integrated broadband microwave and microfluidic sensor dedicated to bioengineering," IEEE Trans. Microw. Theory Tech., vol. 57, no. 12, pp. 3246-3253, Jul. 2009.
2. G. R. Facer, D. A. Notterman, and L. L. Sohn, "Dielectric spectroscopy for bioanalysis: From 40 Hz to 26.5 GHz in a microfabricated wave guide," Appl. Phys. Lett., vol. 75, no. 7, pp. 996-998, Feb. 2001. (Pubitemid 33662087)
3. B. Laemmle, K. Schmalz, C. Scheytt, R.Weigel, and D. Kissinger, "An integrated 125 GHz sensor with read-out circuit for permittivity measurement of liquids," in IEEE MTT-S Int. Dig., Montreal, QC, Canada, Jun. 2012, pp. 1-3.
4. B. Laemmle, K. Schmalz, C. Scheytt, D. Kissinger, and R. Weigel, "A 122 GHz multiprobe reflectometer for dielectric sensor readout in SiGe BiCMOS technology," in IEEE Compound Semicond. Integr. Circuits Symp. Tech. Dig., Waikoloa, HI, Oct. 2011, pp. 1-4.
5. M. Neshat, D. Saeedkia,M. Nagel, and S. Safavi-Naeini, "Electromagnetic modeling of the DNA monolayer in THz bio-chips," in Proc. IEEE Joint 32th Int. Conf. Infrared Millim. Waves 15th Int. Conf. Terahertz Electron., Sep. 2007, pp. 291-292.
6. M. Neshat and S. Safavi-Naeini, "Performance analysis of resonance-based transducers in terahertz bio-chips using equivalent surface impedance model," IEEE Photonics Technol. Lett., vol. 22, no. 20, pp. 1512-1514, Oct. 2010.
7. [Online]. Available: www.ihp-ffo.de/en/services/mpw-prototyping/
8. K. Schmalz, W. Winkler, J. Borngräber, W. Debski, B. Heinemann, and J. C. Scheytt, "A subharmonic receiver in SiGe technology for 122 GHz sensor applications," IEEE J. Solid-State Circuits, vol. 45, no. 9, pp. 1644-1656, Sep. 2010.
9. V. W. Leung, L. E. Larson, and P. S. Gudem, "Digital-IF WCDMA handset transmitter IC in SiGe BICMOS," IEEE J. Solid-State Circuits, vol. 39, no. 12, pp. 2215-2224, Dec. 2004.