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Applied Physics Letters

Volumn 102, Issue 1, 2013, Pages

Ultrahigh-frequency surface acoustic wave generation for acoustic charge transport in silicon

(5) Buyukkose S a Vratzov, B b Van Der Veen, J a Santos, P V c Van Der Wiel, W G a

a UNIVERSITY OF TWENTE (Netherlands)

b NTD Nanotechnology and Devices (Germany)

c PAUL DRUDE INSTITUT FÜR FESTKÖRPERELEKTRONIK (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC CHARGE TRANSPORTS; DEPTH PROFILE; EXCITED MODE; EXTREMELY HIGH FREQUENCIES; HIGH RESOLUTION; HYDROGEN SILSEQUIOXANE; INTERDIGITAL TRANSDUCER; MULTILAYER STRUCTURES; PIEZO-ELECTRIC FIELDS; PLANARIZATION; SI SUBSTRATES; SILICON SUBSTRATES; SURFACE ACOUSTIC WAVES; ULTRA-HIGH-FREQUENCY; UV-BASED NANOIMPRINT LITHOGRAPHIES; ZNO LAYERS;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; HYDROGEN; NANOIMPRINT LITHOGRAPHY; SILICON; ULTRASONIC TRANSDUCERS; ZINC OXIDE;

SILICON OXIDES;

EID: 84872314749 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.4774388 Document Type: Article

Times cited : (30)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.