Fabrication and tolerances of moth-eye structures for perfect antireflection in the mid-infrared wavelength region

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8450, Issue , 2012, Pages

  Imada, Hiroaki ^a   Miyata, Takashi ^b   Sako, Shigeyuki ^b   Kamizuka, Takafumi ^b   Nakamura, Tomohiko ^b   Asano, Kentaro ^b   Uchiyama, Mizuho ^b   Okada, Kazushi ^b   Wada, Takehiko ^c   Nakagawa, Takao ^c   Onaka, Takashi ^b   Sakon, Itsuki ^b  

^a UNIVERSITY OF TSUKUBA   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

^c JAPAN AEROSPACE EXPLORATION AGENCY   (Japan)

Author keywords

Diffractive optics; Moth eye structure; Optical fabrication; Subwavelength structures

Indexed keywords

ANTI-REFLECTION; ASTRONOMICAL INSTRUMENT; CRYOGENIC ENVIRONMENT; ELECTROMAGNETIC SIMULATION; HIGH REFRACTIVE INDEX; MID-INFRARED WAVELENGTHS; MIDINFRARED; MOTH-EYE STRUCTURE; MOTHEYE; OPTICAL FABRICATION; SILICON SURFACES; SUB-WAVELENGTH STRUCTURES; TRANSPARENT MATERIAL; WAVELENGTH REGIONS;

DIFFRACTIVE OPTICS; INFRARED DEVICES; OPTICAL TELESCOPES; REFRACTIVE INDEX; SILICON; SPACE OPTICS; TELESCOPES;

FABRICATION;

EID: 84872247209     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.925762     Document Type: Conference Paper

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