MEMS-based acoustic Array Technology

40th AIAA Aerospace Sciences Meeting and Exhibit

Volumn , Issue , 2002, Pages

  Arnold, David P ^a   Nishida, Toshikazu ^a   Cattafesta, Louis N ^a   Sheplak, Mark ^a  

^a UNIVERSITY OF FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84871609126     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (22)

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9. S. R. Venkatesh, D. R. Polak, S. Narayanan, "Phased Array Design, Validation, and Application to Jet Noise Source Localization, " AIAA Paper 2000-1934, 6th AIAA/CEAS Aeroacoustics Conference, Lahaina, HI, June 2000.
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16. M. Sheplak, K. S. Breuer, and M. A. Schmidt, "A Wafer-Bonded, Silicon-Nitride Membrane Microphone with Dielectrically-Isolated Single Crystal Silicon Piezoresistors, " Solid-State Sensor and Actuator Workshop, pp. 23-26, 1998.
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19. R. Saini, "Design of a MEMS-Based Piezoresistive Microphone, " Master's Thesis, University of Florida, Gainesville, FL, 2001.
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