A piezoresistive microphone for aeroacoustic measurements

ASME International Mechanical Engineering Congress and Exposition, Proceedings

Volumn 2, Issue , 2001, Pages 2855-2862

  Arnold, David P ^a   Gururaj, Sridhar ^a   Bhardwaj, Sunil ^a   Nishida, Toshikazu ^a   Sheplak, Mark ^a  

^a University of Florida   (United States)

Author keywords

Drift; MEMS; Microphone; Noise; Piezoresistor

Indexed keywords

ACOUSTIC NOISE; ACOUSTIC VARIABLES MEASUREMENT; BANDWIDTH; DIELECTRIC MATERIALS; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; MICROELECTROMECHANICAL DEVICES; PACKAGING; PIEZOELECTRIC DEVICES; RESISTORS; SENSITIVITY ANALYSIS; SILICON; SILICON NITRIDE;

DRIFTS; MEMS; PIEZORESISTORS;

MICROPHONES;

EID: 1542411509     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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