Electrochemical atomic layer deposition (E-ALD) of Pt nanofilms using SLRR cycles

Journal of the Electrochemical Society

Volumn 159, Issue 10, 2012, Pages

  Jayaraju, Nagarajan ^a   Vairavapandian, Deepa ^a   Kim, Youn Guen ^a   Banga, Dhego ^a   Stickney, John L ^a  

^a UNIVERSITY OF GEORGIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER; HIGH POTENTIAL; LAYER-BY-LAYER GROWTH; OVERPOTENTIAL; POSITIVE POTENTIAL; PT DEPOSITION; PT PRECURSORS; SURFACE-ROUGHENING;

DEPOSITS; LEAD; PLATINUM; SURFACE ROUGHNESS;

ATOMIC LAYER DEPOSITION;

EID: 84870723003     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/2.053210jes     Document Type: Article

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