Calibration of CMM reference spheres using stitching interferometry

Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010

Volumn 1, Issue , 2010, Pages 79-82

  Jansen, M ^a   Te Voert, M ^b   Haitjema, H ^a  

^a Mitutoyo RCE ^*  (Netherlands)

^b UTRECHT UNIVERSITY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ACCEPTANCE TESTS; CALIBRATION; INTERFEROMETRY; LASER OPTICS; PRECISION ENGINEERING; SPHERES; UNCERTAINTY ANALYSIS;

FIZEAU INTERFEROMETERS; MEASUREMENT UNCERTAINTY; PERFORMANCE TESTS; ROUNDNESS MEASUREMENT; STITCHING INTERFEROMETRY;

COORDINATE MEASURING MACHINES;

EID: 78149458843     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. U. Griesmann et al., "A Simple Ball Averager for Reference Sphere Calibrations", NIST, Proc. of SPIE Vol. 5869 58690S-1.
2. Nicolaus, A.; Bönsch, G. "Absolute volume determination of a silicon sphere with the spherical interferometer of PTB", Metrologia 42 (2005) 24-31
3. U. Griesmann, J. Soons, Q. Wang and D. DeBra, "Measuring Form and Radius of Spheres with Interferometry", CIRP Annals-Manufacturing Technology, Volume 53, Issue 1, 2004, Pages 451-454